Low-cost texturization of large-area crystalline silicon solar cells using hydrazine mono-hydrate for industrial use

Gangopadhyay, Utpal; Kim, K.; Dhungel, Suresh Kumar; Basu, Prabir K.; Yi, Junsin

doi:10.1016/j.renene.2005.10.002

Cited by 32 publications

(16 citation statements)

References 8 publications

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“…From the solar cell industry [1,2] to MEMS (Microelectromechanical Systems) device fabrication [3][4][5] and biological applications [6,7], silicon wet etching profile has been studied and improved in order to address the specific requirements that each of these technological fields require.…”

Section: Introductionmentioning

confidence: 99%

Dynamic Wet Etching of Silicon through Isopropanol Alcohol Evaporation

et al. 2015

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Abstract:In this paper, Isopropanol (IPA) availability during the anisotropic etching of silicon in Potassium Hydroxide (KOH) solutions was investigated. Squares of 8 to 40 µm were patterned to (100) oriented silicon wafers through DWL (Direct Writing Laser) photolithography. The wet etching process was performed inside an open HDPE (High Density Polyethylene) flask with ultrasonic agitation. IPA volume and evaporation was studied in a dynamic etching process, and subsequent influence on the silicon etching was inspected. For the tested conditions, evaporation rates for water vapor and IPA were determined as approximately 0.0417 mL/min and 0.175 mL/min, respectively. Results demonstrate that IPA availability, and not concentration, plays an important role in the definition of the final structure. Transversal SEM (Scanning Electron Microscopy) analysis demonstrates a correlation between microloading effects (as a consequence of structure spacing) and the angle formed towards the (100) plane.

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Section: Introductionmentioning

confidence: 99%

Dynamic Wet Etching of Silicon through Isopropanol Alcohol Evaporation

et al. 2015

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“…As IPA is an expensive chemical product, other solvents are studied to reduce the cost of the process [7]. Alternative solvents are sodium carbonate (Na 2 CO 3 ) [8,9], potassium carbonate (K 2 CO 3 ) [10] and sodium phosphate (Na 3 PO 4 ) [11,12].…”

Section: Introductionmentioning

confidence: 99%

Optimization of sodium carbonate texturization on large-area crystalline silicon solar cells

Marrero

González‐Díaz

Guerrero‐Lemus

et al. 2007

Solar Energy Materials and Solar Cells

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“…The wet etch process was accomplished in 40 wt% sodium hydroxide (NaOH) solution, and maintained the etch temperature at 110°C until the thickness of silicon chips had been thinned to approximately 30 lm and finally become bendable. Microstructure and nanostructure silicon photovoltaic cells are promising for its enhancement of the path length of incident light and the reduction of reflection efficiency [14]. We use a low cost, fast, and simple fabrication method by anisotropic wet etching which is a common method to texture pyramid surface on bulk single-crystalline silicon substrate.…”

Section: Methodsmentioning

confidence: 99%