Low cost and high performance BiCMOS processes: a comparison

Klose, H.; Meister, T.F.; Hoffmann, B.; Pfaffel, B.; Weger, P.; Maier, I.

doi:10.1109/bipol.1989.69486

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Cited by 4 publications

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“…As already stated SICMOS 2S is mainly aimed at digital applications like ECl-gate arrays with on chip memory function and micro-processor IC's. Technology and performance aspects are given in (11)(12)(13). This process allows for the realization of NMOSTs, PMOSTs and self-aligned npn bipolar transistor with an overhead of 5 mask levels compared with the underlying CMOS module.…”

Section: Psa-bjt N-mosmentioning

confidence: 99%