Lorentz force based resonant MEMS magnetic-field sensor with optical readout

Park, Byoungyoul; Li, Meiting; Liyanage, Sampath; Shafai, Cyrus

doi:10.1016/j.sna.2016.01.032

Cited by 35 publications

(30 citation statements)

References 10 publications

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“…Recently, some research groups have developed magnetic field sensors considering silicon resonators. [7][8][9][10][11][12][13][14][15][16][17][18][19][20][21] These sensors are smaller than the conventional superconducting quantum interference devices, fluxgate sensors, and optical fiber sensors. Silicon resonators-based sensors can be fabricated using batch standard silicon micromachined fabrication processes, which decrease their cost and allow the integration with electronic circuits.…”

Section: Introductionmentioning

confidence: 99%

“…Also, these sensors can employ different sensing techniques, including the piezoresistive, capacitive, optical, or piezoelectric. [12][13][14][15][16][17][18][19][20][21] For instance, sensors with piezoresistive transduction have a simple operation principle and easy signal conditioning, but commonly they present offset voltages and their performance may be altered by temperature shifts. Instead, the magnetic field sensors with capacitive detection have less temperature dependence than those with piezoresistive sensing.…”

Section: Introductionmentioning

confidence: 99%

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Design and fabrication of a microelectromechanical system resonator based on two orthogonal silicon beams with integrated mirror for monitoring in-plane magnetic field

Acevedo-Mijangos

Ramírez-Treviño

May-Arrioja

et al. 2019

Advances in Mechanical Engineering

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We present a resonant magnetic field sensor based on microelectromechanical systems technology with optical detection. The sensor has single resonator composed of two orthogonal silicon beams (600 µm × 26 µm × 2 µm) with an integrated mirror (50 µm × 34 µm × 0.11 µm) and gold tracks (16 µm × 0.11 µm). The resonator is fabricated using silicon-on-insulator wafer in a simple bulk micromachining process. The sensor has easy performance that allows its oscillation in the first bending vibration mode through the Lorentz force for monitoring in-plane magnetic field. Analytical models are developed to predict first bending resonant frequency, quality factor, and displacements of the resonator. In addition, finite element method models are obtained to estimate the resonator performance. The results of the proposed analytical models agree well with those of the finite element method models. For alternating electrical current of 30 mA, the sensor has a theoretical linear response, a first bending resonant frequency of 43.8 kHz, a sensitivity of 46.1 µm T−1, and a power consumption close to 54 mW. The experimental resonant frequency of the sensor is 53 kHz. The proposed sensor could be used for monitoring in-plane magnetic field without a complex signal conditioning system.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and fabrication of a microelectromechanical system resonator based on two orthogonal silicon beams with integrated mirror for monitoring in-plane magnetic field

Acevedo-Mijangos

Ramírez-Treviño

May-Arrioja

et al. 2019

Advances in Mechanical Engineering

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“…Directing light beams is the working principle of many optical systems, including spectrometers 1 , imaging systems 2,3 , micro-projectors 4 , optical telecom 5,6 and optical sensors 7 . Scanning micromirrors moved by Micro-electromechanical system (MEMS) actuators have been used for this purpose in many works.…”

Section: Introductionmentioning

confidence: 99%

Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Afsharipour

Soltanzadeh

Park

et al. 2019

J. Micro/Nanolith. MEMS MOEMS

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A low power three-degree-of-freedom scanning micro-mirror is presented. The 2×2 mm mirror is a gimbaless structure, directly supported by single crystal micro-springs. It is actuated by Lorentz force and is able to tilt about two axes and has linear motion in a third axis. The transient and frequency responses of the micro-mirror are analyzed. The Lagrange's equations of motions, describing the dynamic behavior of the system are presented, and show a good agreement with the experimental results. The fabricated MEMS mirror demonstrated a tilt angle of 22.8º at 247.5 Hz about y-axis, and 13.3º at 292.7 Hz about x-axis, in a 0.1 T magnetic field and 20 mA current on the mirror. Power consumption was 2.6 mW of power in tilting motions in resonant operation. With a total dc drive current of 110 mA, 232 µm linear motion was achieved.

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“…Lorentz force sensors do not require any special magnetic materials or large area for sensing, these advantages results in small structures, having linear motion, low power consumption, and ideal for large displacement applications [10]. Multiple readout mechanisms have been employed with the Lorentz force sensors which include piezoresistive [11,12,13], capacitive [3,14,15,16] and optical sensors which are mainly used for out-of-plane detection [10,17]. Resonant frequency shifts using Lorentz force has also been presented in some designs by applying axial stress resulting in increased stiffness of the sensor [4,18,19].…”

Section: Introductionmentioning

confidence: 99%

Experimental analysis of out-of-plane Lorentz force actuated magnetic field sensor

Mian

Dennis

Khir

et al. 2017

IEICE Electron. Express

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Abstract:In this article, we present a simple MEMS magnetic sensor based on Lorentz Force principle. In this work, the sensor is designed, fabricated and characterized capacitively using a standard capacitance to voltage MS3110 circuit. The sensor is fabricated based on double thickness Poly-MUMP surface micromachining process. In this process, the two Poly layers are combined to increase the thickness of the sensor beams and central shuttle. In response to an input excitation current an out of plane motion due to Lorentz force occurs which is detected by the change in capacitance between the moving and static plate. The experimentally detected resonant frequency of the sensor is 5.1 kHz. The experimental sensitivity achieved by the sensor at atmospheric condition is 5.59 V/T for the input current of 30 mA with a damping ratio of 0.010.

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Lorentz force based resonant MEMS magnetic-field sensor with optical readout

Cited by 35 publications

References 10 publications

Design and fabrication of a microelectromechanical system resonator based on two orthogonal silicon beams with integrated mirror for monitoring in-plane magnetic field

Design and fabrication of a microelectromechanical system resonator based on two orthogonal silicon beams with integrated mirror for monitoring in-plane magnetic field

Low-power three-degree-of-freedom Lorentz force microelectromechanical system mirror for optical applications

Experimental analysis of out-of-plane Lorentz force actuated magnetic field sensor

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