Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate

Hayashi, Junki; Suzuki, Masashi; Yonai, Toshifumi; Yamaya, Kosuke; Kakio, Shoji; Kishida, Kazuhito; Asakawa, Shiori; Kuwae, Hiroyuki; Mizuno, Jun

doi:10.1109/ultsym.2018.8579715

Cited by 10 publications

(9 citation statements)

References 9 publications

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“…On the other hand, we reported that LSAW and LLSAW devices with piezoelectric thin plates bonded to high-velocity substrates (quartz and sapphire) have a high K 2 and high Q factor. [8][9][10][11] LLSAW devices with a piezoelectric thin plate/acoustic mirror layer substrate (IHP SAW) which possess a high K 2 and high Q factor was also reported by the manufacturers Murata. 12) However, for these layered structure fabrications, advanced bonding and polishing techniques were required to obtain a strong bonding interface and quite a thin piezoelectric plate.…”

Section: Introductionmentioning

confidence: 84%

Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAlN layer/sapphire or quartz substrate

Suzuki

Sawada

Kakio

2019

Jpn. J. Appl. Phys.

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Longitudinal leaky surface acoustic wave (LLSAW) modes with a high phase velocity are suitable for high-frequency SAW filter applications. However, their attenuation is higher than that of other SAW modes, causing a small Q factor. On the other hand, a low attenuation and high coupling factor K2 in LLSAWs on a piezoelectric thin plate/high-velocity sapphire or quartz substrate have been demonstrated theoretically and experimentally. We expected that LLSAWs propagating on a highly piezoelectric ScAlN layer/sapphire or quartz substrate also have a high phase velocity, high K2 and low attenuation. In this study, the characteristics of LLSAWs on ScAlN layer/sapphire or quartz substrates were theoretically investigated. The cut angle and SAW propagation direction of quartz substrates strongly affect the attenuation of LLSAWs on the layered structure. We found that a LLSAW resonator with (0° 90° 90°) Sc0.4Al0.6N layer/X-cut 30° Y propagation quartz has a high Q factor and high K2, which is adequate for SAW filter applications.

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Section: Introductionmentioning

confidence: 84%

Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAlN layer/sapphire or quartz substrate

Suzuki

Sawada

Kakio

2019

Jpn. J. Appl. Phys.

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“…Elsewhere, another type of device with a similar concept employing layered LT/quartz substrate has been reported by some researchers. [16][17][18][19][20][21][22][23][24][25][26][27][28] For this type of device, the suppression of higher-order modes while keeping other characteristics has been realized by optimizing the cut angle of quartz. 26) However, since the thermal conduction of quartz is not good, the power durability of this type of device is probably inferior compared with I.H.P.…”

Section: Introductionmentioning

confidence: 99%

Behaviors of higher-order modes in I.H.P. SAW devices and discussion of their suppression

Nakagawa,

Ozasa,

Michigami

et al. 2024

Jpn. J. Appl. Phys.

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In this work, behaviors of higher-order modes in an I.H.P. SAW device with a layered LiTaO3/SiO2/SiN/Si substrate are investigated, and suppression techniques of them are discussed. First, variation of the higher-order mode responses with structural parameters are analyzed using two-dimensional FEM. Then, on the basis of the calculated data, structural parameters for higher-order modes suppression with keeping main mode characteristics are determined. In addition, effectiveness of the optimized structure is confirmed from the measured data of fabricated a one-port resonator and filters. In measured data, it is shown that higher-order modes in a specific frequency range are successfully suppressed, while main made characteristics such as Bode-Q, bandwidth, and TCF are almost equivalent with those of the conventional I.H.P. SAW resonators and filters.

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“…One of the key requirements for further advancement of SAW based MMAs and similar devices is finding new piezoelectric materials for the sensitive element (SE) console that could overcome typical limitations of the existing prototypes [8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

Shevchenko

Mikhailenko

Markelov

2020

Sensors

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We propose the use of aluminum nitride (AlN) membranes acting as sensitive elements for the surface acoustic wave (SAW)-based acceleration measurement. The proposed solution is compared against existing prototypes based on the use of quartz (SiO2)/lithium niobate (LiNbO3) membranes that are characterized by extensive anisotropic properties. Using COMSOL Multiphysics 5.4 computer simulations we show explicitly that sensitive elements based on less anisotropic AlN membranes overcome both the low sensitivity limitations of SiO2 and low temperature stability of LiNbO3. Moreover, AlN membranes exhibit nearly double the robustness against irreversible mechanical deformations when compared against SiO2, which in turn allows for further 1.5-fold sensitivity enhancement over LiNbO3 based sensors. Taking into account their acceptable frequency characteristics, we thus believe that the AlN membranes are a good candidate forsensitive elements especially for high acceleration measurements.

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Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate

Cited by 10 publications

References 9 publications

Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAlN layer/sapphire or quartz substrate

Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAlN layer/sapphire or quartz substrate

Behaviors of higher-order modes in I.H.P. SAW devices and discussion of their suppression

Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects

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