Long-wave X-ray radiation mirrors

Development of extreme ultraviolet and soft x-ray multilayer optics for scientific studies with femtosecond/attosecond sources

“…Multilayer coatings have been successfully fabricated using sputtering [18], electron beam evaporation [19], ion beam deposition [20], chemical vapor deposition [20], laser plasma deposition [21], and other methods. Direct current (DC) magnetron sputtering will be discussed as it is the method used by the author to fabricate the majority of his thin films.…”

Design and characterization of x-ray multilayer analyzers for the 50–1000 eV region

“…The fabrication of these multilayers has been accomplished with a variety of techniques, such as for example, evaporation [40], magnetron sputtering [41], ion beam sputtering [42], and laser plasma source deposition [43].…”

“…The integrated reflectivity is determined by the total number of photons reflected, Nx, as the diffraction line is scanned at an angular rate in 0 of dO/dt by the relation[l8] Page 33 (43) (44)…”

Multilayer mirror systems to form hard X-ray beams

“…Further, after Compton's discovery of the total external reflection effect (TER), TER mirrors were used for this purpose. The situation has changed radically with the advances in technology for the fabrication of long-term stability synthetic multilayer periodic structures [1][2][3]. One key advantage of such multilayer structures (MLS) is that they can be made to any desired period.…”

“…The problems of MS deposition have been studied at IPM RAS since 1981 [3]. Deposition of graded multilayer structures is basically the same procedure as deposition of MS with a constant period.…”