Long time stability of electrical contact base on ruthenium nanoscale films at various coating roughness

Karabanov, Sergey M.; Suvorov, Dmitriy V.; Gololobov, G. P.; Gurov, Victor S.; Tarabrin, Dmitriy Yu.; Slivkin, Evgeniy V.

doi:10.1109/rtsi.2015.7325069

Cited by 2 publications

(2 citation statements)

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“…For practical NEM relay utilization in low-power logic circuits, it is critical to achieve good relay contact reliability at the drain-source current of an order of 100 nA (see ESI section 1 †). This cannot be easily accomplished with Au contacts, 21 and therefore requires more durable relay contact materials, such as carbon-based coatings, 22,23 hard metals such as Ti, TiN, 24 W 25 or Ru, [26][27][28] or metal pairs such as Au-Ru. 29 For example, it has been demonstrated that NEM relays with amorphous carbon coated contacts can switch over 100 million cycles at drain-source currents exceeding 1 μA.…”

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confidence: 99%

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Li,

Worsey,

Bleiker

et al. 2023

Nanoscale

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mentioning

confidence: 99%

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Li,

Worsey,

Bleiker

et al. 2023

Nanoscale

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“…Using Ru contacts, Karabanov et al [119] report that they observed an optimal value of surface roughness where contact resistance is minimized. Their data show that some amount of roughness can increase the lifetime of the switch, and for Ru, an optimal value is in the range of 30-60 nm.…”

Section: Selection Of Contact Materialsmentioning

confidence: 99%

A review of micro-contact physics, materials, and failure mechanisms in direct-contact RF MEMS switches

Basu

Adams

McGruer

2016

J. Micromech. Microeng.

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Direct contact, ohmic MEMS switches for RF applications have several advantages over other conventional switching devices. Advantages include lower insertion loss, higher isolation, and better switching figure-of-merit (cut-off frequency). The most important aspect of a direct-contact RF MEMS switch is the metal microcontact which can dictate the lifetime and reliability of the switch. Therefore, an understanding of contact reliability is essential for developing robust MEMS switches. This paper discusses and reviews the most important work done over the past couple of decades toward understanding ohmic micro-contacts. We initially discuss the contact mechanics and multi-physics models for studying Hertzian and multi-asperity contacts. We follow this with a discussion on models and experiments for studying adhesion. We then discuss experimental setups and the development of contact test stations by various groups for accelerated testing of microcontacts, as well as for analysis of contact reliability issues. Subsequently, we analyze a number of material transfer mechanisms in microcontacts under hot and cold switching conditions. We finally review the material properties that can help determine the selection of contact materials. A trade-off between contact resistance and high reliability is almost always necessary during selection of contact material; this paper discusses how the choice of materials can help address such trade-offs.

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Long time stability of electrical contact base on ruthenium nanoscale films at various coating roughness

Cited by 2 publications

References 8 publications

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

A review of micro-contact physics, materials, and failure mechanisms in direct-contact RF MEMS switches

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