Abstract-The optical Kerr effect was measured by observing self-phase modulation in GaAs-AlGaAs superlattice-core waveguides modified by ion-implantation quantum-well intermixing. The band-gap energy was shifted by 68 nm for an implantation dose of 0 5 10 13 cm 2 and annealing temperature of 775 C. The Kerr effect was suppressed by up to 71% in the transverse-electric polarization after intermixing. A reduced polarization dependence of the self-phase modulation was observed after intermixing.Index Terms-Nonlinear optics, optical Kerr effect, quantumwell intermixing (QWI), semiconductor superlattice.
COMPOUND semiconductors have led the way towards monolithically integrated all-optical signal processing devices. Mature fabrication technologies have allowed the development of low-loss waveguides and advanced structures such as Bragg reflection waveguides [1], passive mode converters [2], and cascaded microring resonators [3]. AlGaAs is of particular interest since the optical Kerr effect, a third-order nonlinearity, has been shown to be 500 times stronger than in silica [4]. These nonlinearities are nonresonant and do not rely on free-carrier plasma dispersion effects since the operating wavelengths are typically below the half-band-gap energy. This has opened the possibility of all-optical switching devices such as nonlinear directional couplers (NLDCs) [5] and nonlinear Mach-Zehnder interferometers (NLMZIs) [6] with ultrafast response times necessary for ultrahigh-speed communications systems and signal processing. Multiple quantum-well (MQW) structures based on AlGaAs permit greater flexibility to tailor the band-gap energy to suit the optical properties required for particular applications. Furthermore, the band-gap energy of MQWs can be modified after wafer growth by quantum-well intermixing (QWI) techniques [7]. This cost-effective approach allows selective control , which is a requirement for devices such as QPM gratings. Deep-well semiconductor superlattices have attracted attention as the greater fill-factor and large band discontinuity in comparison to conventional quantum-well structures potentially provides a larger modification to nonresonant optical properties such as the refractive index and nonlinear optical susceptibilities in the transparency window for the complete structure. Thus, shorter and more efficient devices that require less power to operate are possible. In this letter, we demonstrate large modifications of the optical Kerr effect in GaAs-AlGaAs superlattice-core waveguides induced by ionimplantation QWI at wavelengths near the half-band-gap. We have previously reported on the large polarization dependence of the Kerr coefficient in GaAs-AlAs superlattice waveguides [12]. However, measurements indicated the presence of parasitic two-photon absorption (TPA) resonances due to the reduced barrier resulting in asymmetric quantum wells (ASQW) found on either side of the superlattice waveguide core. In the present study, we modified the waveguide structure with several improvements. The new ...