Abstract:During the characterization by electron beam techniques including scanning electron microscope (SEM) and cathodoluminescence at low dimensions, some undesirable phenomena (unwanted effects) can be created, like the thermal effects (or electron beam damage), and these effects can damage the sample. This limits the information one can get from a sample or reduces image spatial resolution. In order to understand these effects, significant efforts have been made but these studies focused on the thermal properties,… Show more
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