2019
DOI: 10.1016/j.surfcoat.2018.04.013
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Local structural changes induced by ion bombardment in magnetron sputtered ZnO: Al films: Raman, XPS, and XAS study

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Cited by 47 publications
(20 citation statements)
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“…Meanwhile, ZnO has a wide application field, including energy conversion and storage, optoelectronics, and environmental remediation [2][3][4]. At present, various kinds of synthetic methods were adopted for preparing the ZnO nanostructure, such as sol-gel, chemical vapor deposition, ultrasonic-assisted method, magnetron sputtering, molecular beam epitaxy, and electrochemical deposition [5][6][7][8][9][10]. Among the preparation methods above, the electro-chemical deposition route provides a better alternative for its facile and feasible operation process.…”
Section: Introductionmentioning
confidence: 99%
“…Meanwhile, ZnO has a wide application field, including energy conversion and storage, optoelectronics, and environmental remediation [2][3][4]. At present, various kinds of synthetic methods were adopted for preparing the ZnO nanostructure, such as sol-gel, chemical vapor deposition, ultrasonic-assisted method, magnetron sputtering, molecular beam epitaxy, and electrochemical deposition [5][6][7][8][9][10]. Among the preparation methods above, the electro-chemical deposition route provides a better alternative for its facile and feasible operation process.…”
Section: Introductionmentioning
confidence: 99%
“…It is known that their physical properties are dependent on their structure, defects are inherent in these films due to methods of production, and the existence of flaws can undermine the properties of these structures. Meng et al investigated the effect of ion bombardment on structural changes of ZnO/Al films employing X‐ray Raman, XPS (see Section 6), and XAS at BL14W of SSRF. XAS at Zn K‐edge was performed at various depositing voltages.…”
Section: Absorptionmentioning
confidence: 99%
“…ITO films deposited by MS 1 are industry standard for numerous applications in photovoltaics, 2 flat-panel displays, 3 organic light-emitting diodes, 4 and smart windows. 5,6 On the other hand, Al- or Ga-doped ZnO (AZO or GZO), 721 Nb-doped TiO 2, 22,23 and BaSnO 3 24,25 films as an alternative material to replace the ITO films have been tried by the MS technique. However, one issue concerning magnetron-sputtered TCO films has yet to be resolved, namely, the nonuniform spatial distribution of electrical resistivity (ρ) on the substrate surface.…”
Section: Introductionmentioning
confidence: 99%
“…However, one issue concerning magnetron-sputtered TCO films has yet to be resolved, namely, the nonuniform spatial distribution of electrical resistivity (ρ) on the substrate surface. 1,721 Specifically, the area of the substrate opposite to the erosion zone of the target typically exhibits a relatively high ρ compared to that of other regions farther from this area. 1,721 At present, the dominant factors responsible for this degradation of the electrical properties of the substrate opposite to the erosion zone of the target are not thoroughly understood.…”
Section: Introductionmentioning
confidence: 99%
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