2024
DOI: 10.1103/physrevmaterials.8.043801
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Local laser-induced solid-phase recrystallization of phosphorus-implanted Si/SiGe heterostructures for contacts below 4.2 K

Malte Neul,
Isabelle V. Sprave,
Laura K. Diebel
et al.
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Cited by 3 publications
(2 citation statements)
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“…The results obtained can be interpreted in such a way that zinc atoms in silicon, with strong compensation, form not only single deep levels but also an entire band of levels characteristic of nanoclusters (or quantum dots) with large carrier capture cross sections [7].…”
Section: Resultsmentioning
confidence: 98%
See 1 more Smart Citation
“…The results obtained can be interpreted in such a way that zinc atoms in silicon, with strong compensation, form not only single deep levels but also an entire band of levels characteristic of nanoclusters (or quantum dots) with large carrier capture cross sections [7].…”
Section: Resultsmentioning
confidence: 98%
“…To elucidate the mechanism of current ows in HC samples of silicon diffusion-doped with zinc with different types of conductivity and degrees of compensation, samples of both n-and p-type conductivities with resistivities lying in the range of 10 2 ÷10 5 Ω•cm at T = 300 K were fabricated using the method high-temperature diffusion according to the technology described in [6]. Ohmic contacts to the studied samples were created by laser soldering of copper wire with a diameter of 100 µm or by applying conductive silver glue [7].…”
Section: Materials and Experimental Detailsmentioning
confidence: 99%