Load characteristics of a spiral coil type thin film microtransformer

Yamaguchi, Kazuhiro; Sugawara, E.; Nakajima, O.; Matsuki, H.; Murakami, K.

doi:10.1109/20.281138

Cited by 41 publications

(10 citation statements)

References 1 publication

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“…Spiral inductors are typically the simplest inductors to fabricate. Although spiral inductors often work very well as electronic components [17], [18], there are some drawbacks to using these types of inductors in an actuator scheme. First, many turns are required to achieve high inductance.…”

Section: Integrated Planar Inductorsmentioning

confidence: 99%

A universal electromagnetic microactuator using magnetic interconnection concepts

Sadler

Liakapoulos²,

Ahn³

2000

J. Microelectromech. Syst.

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This paper describes a new universal electromagnetic microactuator that makes use of novel magnetic interconnection concepts. In order to realize the universal actuator, planar microinductors are fabricated on a substrate which already contains anisotropically etched Ni/Fe permalloy-electroplated magnetic vias or through-holes. The inductor, which acts as a flux generator, is physically located on one side of the wafer, but is magnetically connected to the opposite side of the wafer where actuation occurs. This approach to actuator design provides for maximum flexibility in the range of applications. In addition, it allows the actuator to be readily connected to driving circuitry without interfering with the actuating device. Multi-layer 3-D inductive components are fabricated using a LIGA-like thick photoresist lithography process. The fabricated coils consist of a horseshoe-shaped permalloy-electroplated magnetic core and electroplated copper conductor lines that form the windings around the core. Initial testing using a prototype cantilever beam structure has proven functionality and indicates that the new device has much potential as a low power magnetic microactuator. Many magnetic MEMS applications require an electromagnetic actuator with high efficiency, and some areas which this device is expected to impact include microfluidics, micromotors, optics, and resonating devices.[478]

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Section: Integrated Planar Inductorsmentioning

confidence: 99%

A universal electromagnetic microactuator using magnetic interconnection concepts

Sadler

Liakapoulos²,

Ahn³

2000

J. Microelectromech. Syst.

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“…The effective permeability required to produce the desired inductance for the optimized design is calculated in Appendix I-C and is reported here (2) where is the current density per unit width of conductor at the efficiency [Appendix I-C, eq. (23)].…”

Section: Inductance Adjustmentmentioning

confidence: 99%

Design of microfabricated inductors

Daniel

Sullivan

Sanders

1999

IEEE Trans. Power Electron.

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Possible configurations for microfabricated inductors are considered. Inductance can be set by adjusting permeability through control of anisotropy of a permalloy core or via a patterned quasi-distributed gap. A design methodology based on a simple model is proposed. A more accurate model and a numerical optimization are also developed. Design examples for 5-and 10-MHz buck converters and 2.5-MHz resonant converter applications are presented. He has published technical papers on topics including thin-film magnetics for high-frequency power conversion, dc-dc converter topologies, energy and environmental issues, and modeling, analysis, and control of electric machines. Seth R. Sanders (M'87) received the B.S. degree in electrical engineering and physics in 1981 and the M.S. and Ph.D. degrees in electrical engineering in 1985 and 1989, respectively, all from the Massachusetts Institute of Technology (MIT), Cambridge.

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“…This layered configuration was chosen exactly to reduce eddy current losses in the magnetic core. Reported [7].…”

Section: Introductionmentioning

confidence: 99%