Cubic millimeter power inductor fabricated in batch-type wafer technology

Saidani, Menouer; Gijs, Martin A. M.

doi:10.1109/jmems.2002.807472

Cited by 21 publications

(4 citation statements)

References 15 publications

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“…As an external pressure applies to the sensor membrane, the deformation of the suspended ferrite/PET film leads to the decrease in the separation distance from d 0 to d ’, which further increases on the overall inductance. The relationship of the relative inductive change (Δ L / L 0 ) and the pressure (Δ P ) is expressed as [27,28]:ΔL/L0ΔP=a2(1−ν2)5ET3(1tμr+C), where a and t are the side length of the ferrite film/copper coils and the thickness of the ferrite film, respectively; v , E and T are the effective Poisson’s ratio, Young’s modulus and the total thickness of the ferrite/PET membrane, respectively; C is a constant which represents an approximate magnetic pass length in the air excluded the space between the inductor and ferrite film (see Supplementary Materials for more details). According to Equation (2), the higher the permeability of the ferrite film ( μ r ) is, the larger the inductance changes under a constant pressure, indicating the device sensitivity can be improved by using a ferrite film with a higher μ r .…”

Section: Resultsmentioning

confidence: 99%

A Flexible and Highly Sensitive Inductive Pressure Sensor Array Based on Ferrite Films

Tang

Miao

Chen

et al. 2019

Sensors

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There is a rapid growing demand for highly sensitive, easy adaptive and low-cost pressure sensing solutions in the fields of health monitoring, wearable electronics and home care. Here, we report a novel flexible inductive pressure sensor array with ultrahigh sensitivity and a simple construction, for large-area contact pressure measurements. In general, the device consists of three layers: a planar spiral inductor layer and ferrite film units attached on a polyethylene terephthalate (PET) membrane, which are separated by an array of elastic pillars. Importantly, by introducing the ferrite film with an excellent magnetic permeability, the effective permeability around the inductor is greatly influenced by the separation distance between the inductor and the ferrite film. As a result, the value of the inductance changes largely as the separation distance varies as an external load applies. Our device has achieved an ultrahigh sensitivity of 1.60 kPa−1 with a resolution of 13.61 Pa in the pressure range of 0–0.18 kPa, which is comparable to the current state-of-the-art flexible pressure sensors. More remarkably, our device shows an outstanding stability when exposed to environmental interferences, e.g., electrical noises from skin surfaces (within 0.08% variations) and a constant pressure load for more than 32 h (within 0.3% variations). In addition, the device exhibits a fast response time of 111 ms and a good repeatability under cyclic pressures varying from 38.45 to 177.82 Pa. To demonstrate its practical usage, we have successfully developed a 4 × 4 inductive pressure sensor array into a wearable keyboard for a smart electronic calendar application.

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Section: Resultsmentioning

confidence: 99%

A Flexible and Highly Sensitive Inductive Pressure Sensor Array Based on Ferrite Films

Tang

Miao

Chen

et al. 2019

Sensors

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“…This Si wafer-based process has the potential of realizing a minimum winding width w = 5 µm and a minimum winding pitch p = 15 µm. Figure 1 shows the fabrication sequence of these high-resolution coils (for more details see [5]). For each plasma etching step, an SiO 2 mask is PECVDdeposited and lithographically structured, after which the polyimide is etched in a O 2 plasma to create the throughholes for the positioning of the E-cores (for the power inductors) and to clear the contact paths ( Fig.…”

Section: High-resolution Flexible Coilsmentioning

confidence: 99%

Hybrid flex foil-ferrite technology for miniaturized power and RF applications

Saidani

Gijs

2004

2004 IEEE International Symposium on Industrial Electronics

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“…The paper focuses on the inductor design, with telling details of converter and startup design absent. In a corresponding journal paper of M. Saidini et al [9], the power converter material was not included. J. Kimball et al [10] designed a DC/DC convertor that its power level is below 3 W and voltage is below 3.3 V. Fuel Cell store, an ecotality store has produced a DC/DC converter that inverts input voltage of 0.5-1.6 V to 9-18 V with average input and output working voltages of 1.2 and 12 V respectively.…”

Section: Introductionmentioning

confidence: 99%

A predictive voltage controller for stabilizing single fuel cell convertor

Masoumzadeh

Nasirian

Roshandel

et al. 2010

2010 IEEE Electrical Power &Amp; Energy Conference

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Serious and challengeable role in markets of low power supplies for cellular phones and other small portable devices is expected for single fuel cell in future. Single fuel cell voltage level is extremely low in comparison with its output current. According to the extremely low level of the voltage, a suitable dc/dc boost converter must be used for increasing the voltage. In this paper, a model for a single fuel cell is presented and the effect of external load variation and changing of reactant pressure on cell performance is investigated. Moreover, a predictive voltage controller for boost convertor of PEM fuel cell is presented, simulated and validated using MATLAB/Simulink. The results show a constant regulated voltage with admissible startup versus variations of converter reactant pressure and external load that has not achieved in pervious works.Considerable improvement in efficiency of fuel cell converter is gained compare to extremely low level of reactant pressure. It hopes to improve the efficiency and performance of the converter via more precise elements in future.I.

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Cubic millimeter power inductor fabricated in batch-type wafer technology

Abstract: [744]

Cited by 21 publications

References 15 publications

A Flexible and Highly Sensitive Inductive Pressure Sensor Array Based on Ferrite Films

A Flexible and Highly Sensitive Inductive Pressure Sensor Array Based on Ferrite Films

Hybrid flex foil-ferrite technology for miniaturized power and RF applications

A predictive voltage controller for stabilizing single fuel cell convertor

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