Lithographic Data Generation Algorithm based on Micromirror Cell Decomposition

Jin, Younghun; Park, Kiwon; Kim, Haeryung; Seo, Manseung

doi:10.1109/sice.2006.315722

Cited by 8 publications

(1 citation statement)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Moreover, the proposed communication model is well behaved, accomplishing the management of multiple service modules under the multiply distributed environment. The pattern generator on an individual server is developed based on the occupancy limit which is related to the area ratio between the micromirror and pattern [5]. The FTP service supported by the Windows operating system is utilized as the service module for file transfer.…”

Section: Remote Process Managementmentioning

confidence: 99%

Proposal of Distributed Architecture for Micromirror Image Generation in Maskless Optolithography System

Choi

Jin

Kim

et al. 2006

2006 SICE-ICASE International Joint Conference

Self Cite

View full text Add to dashboard Cite

Recent maskless lithography technologies using MEMS devices provide the attractive advantage of low cost manufacturing such as one for semiconductors. However, in order to utilize maskless lithography technology into large Flat Panel Display manufacturing, the difficulties that arise in the generation and transmission of huge micromirror image data should be overcome. We aim to develop a strategy for real time data generation and transmission by distributing the huge image data being individually processed on multiple computers. Entire image data generation processes relevant to maskless lithography are analyzed upon the unit micromirror. As a result, the distributed architecture capable of image data generation and transmission is devised. Communications and controls between the distributed systems are performed upon the client-sever model. For the verification of the proposed architecture, lithography experiments fabricating actual patterns on wafers are carried out with a set of two image data individually generated on two different computers upon the distributed architecture. The boundary created by two interfacing micromirrors is matched exactly. The accuracy of the system upon the proposed architecture is ensured through the actual FPD fabrication.

show abstract

Section: Remote Process Managementmentioning

confidence: 99%