LiTaO<sub>3</sub>and LiNbO<sub>3</sub>Strip-Type Resonators

Fujiwara, Y.; Wakatsuki, Noboru

doi:10.1109/t-uffc.1987.26909

Cited by 22 publications

(7 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The strip-type TS mode 6 MHz BAWR using 0.32 mm thick X LT with a self-suspended structure reported in Ref. 25 shows a mechanical Q of 5000. As the loss of LT, material Q m of 4000 was assumed as a mechanical Q of 5000 was obtained for the 6 MHz BAWR.…”

Section: Simulation and Considerationmentioning

confidence: 92%

See 1 more Smart Citation

3.4 GHz strip-type thickness shear mode solidly-mounted bulk acoustic wave resonator using X-cut LiTaO₃

Kadota¹,

Ishii²,

Tanaka³

2022

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

This paper describes a high-frequency bulk acoustic wave resonator (BAWR) with a solidly-mounted (SM) structure using single crystal LiTaO3 (LT) thin plates. A Bragg reflector solidly supports the LT thin plate, which is fragile if self-suspended. The two kinds of BAWRs use a strip-type thickness shear mode in 0.56 μm thick X37°Y LT and X127°Y LT. The Bragg reflector is made of 5 pairs of Al and Ta films, i.e. 10 layers in total. The X37°Y LT SM structure BAWRs exhibited a resonance frequency (f r) of 3.250 GHz, an anti-resonance frequency (f a) of 3.463 GHz, a bandwidth (BW) of 6.6%, and an impedance (Z) ratio of 48 dB. The X127°Y LT BAWR has a similar characteristic with f r of 3.153 GHz, f a of 3.367 GHz, a BW of 6.8%, and a Z ratio of 46 dB. The X37°Y LT BAWR showed an advantage of 2 dB compared with the X127°Y LT one. The Al film acts as a low acoustic impedance film, but an acoustic impedance layer combination of Al and Ta films is not suitable and that of SiO2 and W films suitable among the four combinations, Al/Ta. SiO2/Ta, Al/W, and SiO2/W films. Although the acoustic impedance layer combination, the acoustic film quality, the structure, electrode design, and fabrication process of the fabricated BAWRs were not optimized yet, this result suggests the high potential of this device.

show abstract

Section: Simulation and Considerationmentioning

confidence: 92%

“…Fujiwara and Wakatsuki reported strip-type TS mode BAWR using a 0.32 mm thick X LT, which had a high mechanical Q of 5000 and suitable coupling factor k 2 of 18.5% at a low frequency of 6 MHz. 25,26) To compare the fabricated SM-BAWRs, we fabricated a similar strip-type TS mode BAWR using a 0.35 mm thick X LT plate as shown in Fig. 1.…”

Section: Introductionmentioning

confidence: 99%

3.4 GHz strip-type thickness shear mode solidly-mounted bulk acoustic wave resonator using X-cut LiTaO₃

Kadota¹,

Ishii²,

Tanaka³

2022

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…Kadota et al proposed a strip-type BAW resonator using X37°Y-LT, but the BW is narrow. 16) Fujiwara reported a strip-type BAW resonator using X-LT and 163Y-LN, 20) which also used different Euler angles compared with this work. It is shown that the maximal e 34 in (90°, 90°, 34°) LN is 4.38 C m −2 , which is 14% higher than e 34 in rotated Y-cut.…”

Section: Simulationmentioning

confidence: 97%

“…[15][16][17] Kadota et al also reported that TE mode BAW resonators of self-suspended type 18) and SMR type using 36°Y-LN 19) operated at higher frequencies of 4 and 7 GHz than TS mode, but the BW is narrower as 4.1%-8.4%. Fujiwara et al reported a strip-type resonator working at low frequency using X-LT and 163°Y-LN 20,21) for the first time. However, a different Euler angle of LN is used in this work although the frequency is similar.…”

Section: Introductionmentioning

confidence: 99%

Serially connected strip-type acoustic wave resonator using X-40°Y LiNbO₃ (XSAR)—feasibility study using macro model

Guo,

Kadota,

Tanaka

2024

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

This work presents a new serially connected strip-type acoustic resonator using X40°Y-LiNbO3 (LN) (XSAR). The proposed design is composed of a serial of strip-type bulk acoustic wave (BAW) resonators connected together. The volume between two strips is penetrated through to eliminate the spurious response and enhance quality (Q) factor. The Euler angle (90°, 90°, 40°) of LN is optimized to obtain the maximal piezoelectric constant e34, which determines the coupling factor of shear mode of the resonator. Simulation results show that the new design is superior in terms of impedance ratio (Z-ratio) and bandwidth (BW) and exhibits the largest BW of 32% ever reported. The slow shear mode spurious response is successfully removed by the proposed penetrated structure combined with narrow strip. Furthermore, the device was prototyped in macro scale using 350 μm thick LN, by which the ultra-wide BW and potentially good performance in high frequency were confirmed.

show abstract

“…Inversely, for θ = 253° ( Y + 163°), coefficient k

_{s}^{2}

is in the range of 65.5% when coefficient k

_{t}^{2}

is null. These two orientations, which are generally used for surface acoustic waves, can be selected for realizing BAW resonators with high electromechanical couplings [7, 8] using either thickness or shear waves.…”

Section: Baw Resonatorsmentioning

confidence: 99%

A general procedure for the design of bulk acoustic wave filters

Catherinot

Giraud

Chatras

et al. 2011

Int J RF and Microwave Comp Aid Eng

View full text Add to dashboard Cite

This article presents a procedure for the design of bulk acoustic wave (BAW) filters. The procedure consists of optimizing the modified Butterworth-Van Dyke model of each resonator, considering appropriate technological parameters. The approach is demonstrated first to design a classical aluminum nitride-based BAW filter but remains valid for other piezoelectric layers, considering either longitudinal or transverse acoustic wave coupling. The approach is finally applied to the design of a lithium niobate (LiNbO 3 ) BAW filter for wide-band filtering applications.

show abstract

LiTaO₃and LiNbO₃Strip-Type Resonators

Cited by 22 publications

References 4 publications

3.4 GHz strip-type thickness shear mode solidly-mounted bulk acoustic wave resonator using X-cut LiTaO₃

3.4 GHz strip-type thickness shear mode solidly-mounted bulk acoustic wave resonator using X-cut LiTaO₃

Serially connected strip-type acoustic wave resonator using X-40°Y LiNbO₃ (XSAR)—feasibility study using macro model

A general procedure for the design of bulk acoustic wave filters

Contact Info

Product

Resources

About

LiTaO3and LiNbO3Strip-Type Resonators

Cited by 22 publications

References 4 publications

3.4 GHz strip-type thickness shear mode solidly-mounted bulk acoustic wave resonator using X-cut LiTaO3

3.4 GHz strip-type thickness shear mode solidly-mounted bulk acoustic wave resonator using X-cut LiTaO3

Serially connected strip-type acoustic wave resonator using X-40°Y LiNbO3 (XSAR)—feasibility study using macro model

A general procedure for the design of bulk acoustic wave filters

Contact Info

Product

Resources

About

LiTaO₃and LiNbO₃Strip-Type Resonators

3.4 GHz strip-type thickness shear mode solidly-mounted bulk acoustic wave resonator using X-cut LiTaO₃

3.4 GHz strip-type thickness shear mode solidly-mounted bulk acoustic wave resonator using X-cut LiTaO₃

Serially connected strip-type acoustic wave resonator using X-40°Y LiNbO₃ (XSAR)—feasibility study using macro model