A general procedure for the design of bulk acoustic wave filters

Catherinot, Lise; Giraud, Sylvain; Chatras, Matthieu; Bila, Stéphane; Cros, Dominique; Baron, T.; Ballandras, S.; Estagerie, Laetitia; Monfraix, P.

doi:10.1002/mmce.20550

Cited by 20 publications

(12 citation statements)

References 15 publications

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“…Bulk acoustic wave (BAW) resonators are used in a variety of fields such as ultra-stable frequency reference [1], spectral filtering in analog circuits [2], or mass sensing [3]. With the recent development in cryogenic quartz technology with its exceptional quality factors [4,5], new application areas have emerged [6].…”

Section: Introductionmentioning

confidence: 99%

A new method of probing mechanical losses of coatings at cryogenic temperatures

Galliou

Deléglise

Goryachev

et al. 2016

Review of Scientific Instruments

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A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of extremely high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coatings nowadays. The approach is demonstrated for Chromium, Chromium/Gold and a multilayer tantala/silica coatings. The Ta2O5/SiO2 coating has been found to exhibit a loss angle lower than 1.6 × 10 −5 near 30 MHz at 4 K. The results are compared to the previous measurements.

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Section: Introductionmentioning

confidence: 99%

A new method of probing mechanical losses of coatings at cryogenic temperatures

Galliou

Deléglise

Goryachev

et al. 2016

Review of Scientific Instruments

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“…Because the resonators are to be fabricated on the same wafer, the thickness of the piezoelectric layer is fixed. Increasing the top electrode layer thickness, known as mass loading, is a practical process for altering the resonant frequency of the shunt resonator and producing the pass band when the impedance of series resonators is low and impedance of the shunt resonator is high [16]. In the present design, the top electrode has a thickness of 0.20 mm for series resonator.…”

Section: Tfbar Design and Simulationmentioning

confidence: 97%

“…f s and f p are the series and parallel resonance frequencies, respectively. R k is the square resistance of the electrodes, A is the electrode area, L and W are the length and width of the top electrode [16]. The values obtained for the components of the MBVD model are tabulated in Table 4.…”

Section: Filter Design and Simulationmentioning

confidence: 99%

Design and Simulation of a Zinc Oxide Thin Film Bulk Acoustic Resonator Filter for 2.6 GHz Band Applications

Dutta

Singh

Singhal

et al. 2015

IETE Journal of Research

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This work presents the design and simulation of a zinc oxide based thin film bulk acoustic resonator (TFBAR) bandpass filter for 2.6 GHz band applications. Third and fifth-order filters in ladder topology are designed and compared. The third-order filter has an insertion loss of 1.62 dB and return loss of 18.97 dB with a bandwidth of 80 MHz whereas the fifth-order filter has insertion loss, return loss, and bandwidth of 2.85 dB, 25.28 dB, and 60 MHz, respectively. With a central frequency of 2.67 GHz, the designed filter has applications in the 2.6 GHz (2500À2690 MHz) band, which has been identified by the International Telecommunication Union as a global frequency band for mobile broadband services.

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“…By this way, two main topologies are used: the ladder [13] and the lattice [14] ones. ladder topology (Figure 1) is the easiest method to achieve BAW filter.…”

Section: Conceptionmentioning

confidence: 99%

Wideband Lithium Niobate FBAR Filters

Baron

Lebrasseur

Bassignot

et al. 2013

International Journal of Microwave Science and Technology

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Filters based on film bulk acoustic resonators (FBARs) are widely used for mobile phone applications, but they can also address wideband aerospace requirements. These devices need high electromechanical coupling coefficients to achieve large band pass filters. The piezoelectric material LiNbO 3 complies with such specifications and is compatible with standard fabrication processes. In this work, simple metal-LiNbO 3 -metal structures have been developed to fabricate single FBAR elements directly connected to each other on a single chip. A fabrication process based on LiNbO 3 /silicon Au-Au bonding and LiNbO 3 lapping/polishing has been developed and is proposed in this paper. Electrical measurements of these FBAR filters are proposed and commented exhibiting filters with 8% of fractional bandwidth and 3.3 dB of insertion losses. Electrical measurements show possibilities to obtain 14% of fractional bandwidth. These devices have been packaged, allowing for power handling, thermal, and ferroelectric tests, corresponding to spatial conditions.

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A general procedure for the design of bulk acoustic wave filters

Cited by 20 publications

References 15 publications

A new method of probing mechanical losses of coatings at cryogenic temperatures

A new method of probing mechanical losses of coatings at cryogenic temperatures

Design and Simulation of a Zinc Oxide Thin Film Bulk Acoustic Resonator Filter for 2.6 GHz Band Applications

Wideband Lithium Niobate FBAR Filters

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