Design and Simulation of a Zinc Oxide Thin Film Bulk Acoustic Resonator Filter for 2.6 GHz Band Applications

Abstract

This work presents the design and simulation of a zinc oxide based thin film bulk acoustic resonator (TFBAR) bandpass filter for 2.6 GHz band applications. Third and fifth-order filters in ladder topology are designed and compared. The third-order filter has an insertion loss of 1.62 dB and return loss of 18.97 dB with a bandwidth of 80 MHz whereas the fifth-order filter has insertion loss, return loss, and bandwidth of 2.85 dB, 25.28 dB, and 60 MHz, respectively. With a central frequency of 2.67 GHz, the designed filter has applications in the 2.6 GHz (2500À2690 MHz) band, which has been identified by the International Telecommunication Union as a global frequency band for mobile broadband services.

Synthesis and Characterizations of ZnO Thin Films Grown by Physical Vapor Deposition Technique

“…Due to the very high optical transmittance (T) in the visible (Vis.) region and an excellent piezoelectric (PE) characteristic, several another uses of ZnO thin films includes the surface acoustic wave device, and the film bulk acoustic resonator filter (FBARF)have also studied and investigated [12,13]. The zinc oxide thin films have been prepared and synthesized by using different physical and chemical methods and techniques [14].…”