2014
DOI: 10.1021/am404943y
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Liquid-Phase-Deposited Silicon Oxide Film as a Mask for Single-Sided Texturing of Monocrystalline Si Wafers

Abstract: A silicon oxide film doped with fluorine was grown on a (100)-oriented Si wafer through liquid-phase deposition (LPD) as a protective mask of the wafer's rear side in order to chemically texture the wafer's unprotected front side in a basic etching bath, which is a new process in solar-cell manufacturing. The growth rate of the LPD-SiO2 film increased monotonically with an increase of the deposition temperature up to 60 °C for a given precursor solution. Field-emission scanning electron microscopy (FE-SEM) ind… Show more

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Cited by 6 publications
(3 citation statements)
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“…Second, a free-standing flexible film of PFCB-Si is also prepared by a two-step procedure as described in the Experimental Section. Usually, TEOS-based solid films, prepared by chemical vapor deposition (CVD) or plasma enhanced CVD (PECVD), are hard and brittle. , No reports on the free-standing TEOS-based solid films have been found. This contribution first provides a highly transparent and flexible polysiloxane film (Figure b) derived from TEOS.…”
Section: Resultsmentioning
confidence: 99%
“…Second, a free-standing flexible film of PFCB-Si is also prepared by a two-step procedure as described in the Experimental Section. Usually, TEOS-based solid films, prepared by chemical vapor deposition (CVD) or plasma enhanced CVD (PECVD), are hard and brittle. , No reports on the free-standing TEOS-based solid films have been found. This contribution first provides a highly transparent and flexible polysiloxane film (Figure b) derived from TEOS.…”
Section: Resultsmentioning
confidence: 99%
“…There was also irritant gas generated in the experiment, it was speculated it was the formation of HF. The chemical reactions during deposition were summarized below [24]:
Figure 6 Schematic diagram of coating deposition mechanism on carbon fibres by liquid phase deposition.
…”
Section: Resultsmentioning
confidence: 99%
“…There was also irritant gas generated in the experiment, it was speculated it was the formation of HF. The chemical reactions during deposition were summarized below [24]:…”
Section: Deposition Kineticsmentioning
confidence: 99%