Liquid metal ion source working with an Er70Fe22Cr5Ni3alloy

Bischoff, L.; Teichert, J.

doi:10.1088/0022-3727/33/13/101

Cited by 10 publications

(4 citation statements)

References 14 publications

(20 reference statements)

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“…The utilization of these unique point-like sources in FIBs Energy spread of singly charged, doubly charged, and polyatomic ions (cluster) as a function of their mass-to-charge ratio obtained from alloy LMIS like AuGeSi, AuGe [30], AlCeC [31], ErFeNiCr [32], CoNd [33], GaBiLi [34] and from pure metal LMIS for Ga, Sn [35], and Bi [36] at a constant emission current of 15 μA with a diameter of less than 10 nm and current densities up to more than 20 A cm −2 opens a broad field of new applications. Possible other elemental metals and eutectic alloys, mostly investigated and tested in the own lab, are listed in Table 19.1.…”

Section: Liquid Alloy Ion Sources: Fundamentals and Applicationsmentioning

confidence: 99%

Nanostructures by Mass-Separated FIB

Bischoff

Böttger

Philipp

et al. 2013

Lecture Notes in Nanoscale Science and Technology

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The introduction of mass-separated systems in the field of focused ion beams significantly increases the area of application in nanotechnology due to the availability of a broad spectrum of ions with the same advantages compared to classical Ga instruments. A short description of the configuration of a mass-separated FIB tool is given as well as the fundamentals of alloy liquid metal ion sources. Examples of application include patterned tailoring of functional surfaces and ioninduced phase transformation in thin layers, in particular the Si nanowire fabrication by FIB implantation and subsequent wet-chemical, anisotropic etching and the FIB lithography of thin ta-C films. Furthermore, the ion beam synthesis (IBS) of CoSi 2 nanostructures by Co-FIB writing and annealing, and the modification of surface morphology by various mono-and polyatomic projectiles in a broad energy and temperature range in different materials are described and discussed.

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Section: Liquid Alloy Ion Sources: Fundamentals and Applicationsmentioning

confidence: 99%

Nanostructures by Mass-Separated FIB

Bischoff

Böttger

Philipp

et al. 2013

Lecture Notes in Nanoscale Science and Technology

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“…It is also possible to use liquid metal ion sources and alloys of rare earths and other metals, characterised by lower melting point than pure rare earth (e.g. 765°C for Er-Ni [13] or 860°C for quarternary alloy Er 70 Fe 22 Cr 5 Ni 3 [14] ). Extracted ion currents are less than 1 mA, which may be to low for implantation purposes.…”

Section: Introductionmentioning

confidence: 99%

Production of rare earths ion beams in arc discharge ion source using their oxides

Turek

Droździel

Pyszniak

et al. 2016

ELECTROTECHNICAL REVIEW

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Production of rare earth's ions from using their oxides and carbon tetrachloride (CCl 4) vapor is described. Mechanism of internal chemical synthesis of rare earth's chlorides is proposed. Working characteristics like dependences of ion currents on discharge and filament current, magnetic flux density as well as CCl 4 flux are presented and discussed in order to find optimal working parameters. The separated currents of 18 A, 5 A, 3 A and 12 A were obtained for Eu + , Gd + , Ho + and Pr + , respectively. Streszczenie. W atykule opisana jest metoda wytwarzania wiązek jonów pierwiastków ziem rzadkich wykorzystująca ich tlenki i pary czterochlorku węgla (CCl 4). Zaproponowano także wyjaśnienie mechanizmu wewnętrznej syntezy chlorków ziem rzadkich. Celem znalezienia optymalnych parametrów pracy rozpatrywanane są charakterystyki robocze źródła, takie jak zależności natężenia prądów jonowych od natężeń prądu wyładowania, grzania katody, indukcji magnetycznej zewnętrznego magnesu jak również nacieku CCl 4. Otrzymano rozseparowane wiązki jonów

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“…The weak spot of such solution is an effective vapor transport, as well as low vapor pressure of non-volatile substances. The second difficulty could be overcome by using alloys of low melting point [4]. Another popular group of feeding material are volatile compounds like halides or organometallic compounds [5].…”

Section: Introductionmentioning

confidence: 99%

Plasma Ion Source with an Internal Evaporator

et al. 2011

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A new construction of a hollow cathode ion source equipped with an internal evaporator heated by a spiral cathode filament and arc discharge is presented. The source is especially suitable for production of ions from solids. The proximity of arc discharge region and extraction opening enables production of intense ion beams even for very low discharge current (I a = 1.2 A). The currents of 50 µA (Al + ) and 70 µA (Bi + ) were obtained using the extraction voltage of 25 kV. The source is able to work for several tens of hours without maintenance breaks, giving possibility of high dose implantations. The paper presents the detailed description of the ion source as well as its experimental characteristics like dependences of extracted currents and anode voltage on anode and cathode currents.

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Liquid metal ion source working with an Er₇₀Fe₂₂Cr₅Ni₃alloy

Cited by 10 publications

References 14 publications

Nanostructures by Mass-Separated FIB

Nanostructures by Mass-Separated FIB

Production of rare earths ion beams in arc discharge ion source using their oxides

Plasma Ion Source with an Internal Evaporator

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