Liquid film enhanced laser cleaning

Zapka, Werner; Tam, A. C.; Ayers, G.; Ziemlich, W.

doi:10.1016/0167-9317(92)90097-b

Cited by 13 publications

(3 citation statements)

References 4 publications

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“…The particles can obtain large acceleration and be ejected from the surface if this external force is larger than the adhesion force. [11][12][13][14][15] The temperature rise ⌬T of the top surface supporting particles is approximately given by 14…”

Section: Cleaning Mechanismsmentioning

confidence: 99%

“…[11][12][13][14][15][16][17] Some researchers use laser irradiation to remove particles and molecular film contamination from optical surfaces such as a mirror in a spaceborne system. 18,19 In order to deposit high quality epitaxial films, the possibility of using laser to remove native oxide and other contaminants on a single-crystal substrate surface for producing an atomically clean surface has been examined.…”

Section: Introductionmentioning

confidence: 99%

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Laser removal of particles from magnetic head sliders

Wei

Hong

et al. 1996

Journal of Applied Physics

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A quantitative investigation of laser-induced removal of particles from magnetic head slider surfaces has been carried out. The damage thresholds of magnetic head sliders for laser fluence and pulse number were found to be about 150 mJ/cm 2 and 5000 pulses at 100 mJ/cm 2 , respectively. For laser fluence or pulse number above the damage threshold, laser irradiation onto magnetic head slider surfaces can cause microcracks around the pole tips. It is found that laser cleaning efficiency increases with increasing laser fluence and pulse number, but does not depend on repetition rate up to 30 Hz. Laser cleaning efficiency of removing particles from magnetic head slider surfaces can reach about 90% for Al particles and 100% for Sn particles, respectively, under appropriate conditions without causing damage. The mechanisms of laser cleaning of particles from magnetic head slider are laser-induced surface vibration, particle vibration, particle thermal expansion, and ablation with high laser fluence, which produce forces strong enough to detach particles from slider surfaces. Based on the above cleaning mechanisms, the dependence of laser cleaning efficiency on laser parameters can be explained.

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Section: Cleaning Mechanismsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Laser removal of particles from magnetic head sliders

Wei

Hong

et al. 1996

Journal of Applied Physics

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“…To meet these needs, the plasma mechanical activation and extraction of particle contamination ͑PLASMAX͒ process is being developed by Beta Squared, Inc. PLASMAX is one of the limited number of alternatives, along with dry and steam laser cleaning techniques, that are being developed for the next generation of cleaning tools. [2][3][4] The research presented here focuses on the dynamic analysis of the PLASMAX process for optical photomasks and electron-beam projection lithography ͑EPL͒ masks.…”

Section: Introductionmentioning

confidence: 99%