Liquid alloy ion sources for Pd and Cu

Abstract

For generation of Cu and Pd ions in liquid metal ion sources Cu-Ga, Cu-Ge, Pd-Ge, Pd-Si and Pd-Sn alloys have been tested as source feed materials. The range of coexistence of solid and liquid phases and the eutectic temperature of the investigated alloys were determined by differential thermal analysis. A stable operation of liquid metal ion sources could be obtained with Cu63.5Ge36.5 (at.%) and Pd36Ge64 (at.%) alloys. The recorded mass spectrum of a Cu63.5Ge36.5 liquid metal ion source has shown a high current of Cu+ ions. The high current of Pd+ ions in the mass spectrum of the Pd36Ge64 liquid metal ion source shows that this alloy is a suitable source material for Pd ion generation. An investigation of the ion flux ratio, which depends on the total source current, has revealed a maximum intensity of doubly charged ions in the low-current region. The fraction of doubly charged Cu and Pd ions is less than 1%.

A High‐Resolution Versatile Focused Ion Implantation Platform for Nanoscale Engineering

“…The P-NAME tool is configured to provide high-quality isotopic separation of Si which leads to the highest resolving power (R = 560) for the singly charged species, which significantly outperforms other reported systems. [20,[38][39][40][41][42][43][44][45][46][47] The instrument also provides sufficient separation of the doubly charged Si isotopes with a lower value of R, enabling the higher ion current to be taken advantage of. The lowest resolving power is obtained for B þ (R = 90) which is still sufficient to resolve both isotopes, though in this case no mass resolving aperture was utilized due to the low ion current.…”

“…154 [20] Si þ 560 (AE15) 288, [20] 20-40, [38] 20, [39] 80, [40] 100, [41] 150 [42] Si 2þ 263 (AE3) 296, [40] 20-40, [38] 13, [39] 156, [40] 173, [41] 146 [42] Mn þ 367 (AE1) 70 [20] Co þ 124 (AE2) 124 [20] Co 2þ 205 (AE3) 95 [20] (Cu 2 ) þ 351 (AE6) 123 [43] Cu þ 469 (AE2) 411 [44] Ge þ 387 (AE3) 70, [20] 60, [20] 20, [41] 70 [43] Ge 2þ 365 (AE2) 180, [20] 130 [41] In þ 215 (AE5) 30 [20] Sn þ 190 (AE12) 178 [20] Sn 2þ 496 (AE34) 412, [20] 479 [20] Sb þ 296 (AE7) 112 [20] Sb 2þ 500 (AE2) 295 [20] Nd þ 320 (AE3) 60 [20] Nd 2þ 404 (AE2) 56 [20] Er 2þ 371 (AE11) 50, [45] 20 [45] Er 3þ 526 (AE12) 130 [45] Au þ 245 (AE2) 186, [20] 10, [38] 10, [39] 40, [40] 60, [20] 30, [41] 70 [42] Au 2þ 363 (AE2) 191, [20] 10, [38] 10, [39] 70, [40] 70,…”