Wifh a focus on fhe sofmare perspecfive, this paper examines benefits, scope, requirements, and key issues of the integration af Technology-CAD with Physical Design. Two examples of sofmare components for integration of TCAD with layouf data arepresenfed, and use cases are identified which result in d@erent sofmare requirementc. Layout data volume and ifs relation fo domain size and resolution of TCAD models is discussed, leading f o the conclusion that full-chip layout processing capabilifies is a key enabling component that is becoming an integralpart of mainstream TCAD.