Developing and Integrating TCAD Applications with the Semiconductor Wafer Representation

Abstract-This paper describes the Semiconductor Wafer Representation (SWR) for representing and manipulating wafer state during process and device simulation. The goal of the SWR is to provide an object-oriented interface to a collection of functions designed for developing and integrating Technology CAD (TCAD) applications. By providing functions which can be common across many applications, we aim to greatly reduce tool development and integration time. Corporate, vendor, and university TCAD developers have worked together under the auspices of the CAD Framework Initiative to create an architecture and C++ programming interface for an S W R 1.0 draft standard.Here we will describe this architecture and the results of creating and using a prototype implementation of the standard both to integrate existing TCAD tools and to develop simple new tools.

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DOE/Opt: a system for design of experiments, response surface modeling, and optimization using process and device simulation

Boning

Mozumder

1994

IEEE Trans. Semicond. Manufact.

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Developing and Integrating TCAD Applications with the Semiconductor Wafer Representation

Cited by 6 publications

References 4 publications

The Viennese integrated system for technology CAD applications

The Viennese integrated system for technology CAD applications

Semiconductor wafer representation for TCAD

DOE/Opt: a system for design of experiments, response surface modeling, and optimization using process and device simulation

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