Linearizing an electrostatically driven MEMS speaker by applying pre-distortion

Tumpold, David; Stark, Matthias; Euler-Rolle, Nikolaus; Jakubek, Stefan

doi:10.1016/j.sna.2015.10.038

Cited by 8 publications

(5 citation statements)

References 16 publications

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“…In electrostatic speakers, the diaphragm movement, and therefore the sound output, is determined by the force generated by the electrostatic field between the plates under AC voltage driving [47]. Although they feature high miniaturization and cost-effective fabrication, electrostatic speakers suffer from non-linearity issues, are limited by the pull-in effect, and require high driving voltages [39,58,59].…”

Section: Mobile Membranementioning

confidence: 99%

“…Electrostatic speakers can be realized with industrial CMOS-MEMS processes with only very few additional post-process steps [47,83], obtaining frequency responses devoid of any resonance peaks [84] and achieving high linearity thanks to pre-distortion of the driving signal [58]. Figure 11 In addition, novel structures have been investigated in order to diminish damping losses and increase power efficiency: a peripheral electrode configuration was proposed in [86], and a membrane requiring no support anchors thanks to electrostatic levitation was introduced in [87].…”

Section: Mems Speakers State-of-the-artmentioning

confidence: 99%

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Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

et al. 2023

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In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety of highly topical applications (consumer devices, medical equipment, automotive systems, and many more). This review, besides analyzing the main integrated sound transduction principles typically exploited, surveys the current State-of-the-Art scenario, presenting the recent performance advances and trends of MEMS microphones and speakers. In addition, the interface Integrated Circuits (ICs) needed to properly read the sensed signals or, on the other hand, to drive the actuation structures are addressed with the aim of offering a complete overview of the currently adopted solutions.

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Section: Mobile Membranementioning

confidence: 99%

Section: Mems Speakers State-of-the-artmentioning

confidence: 99%

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

et al. 2023

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“…The theoretical results are shown to conform with measurements. A different technique-linearization of electrostatically driven MEMS speakers by applying pre-distortionis given in [86], where an FEM model for MEMS electrostatic speakers is discussed. De Pasquale et al present modeling and validation of micro acoustic sources for hearing applications [87].…”

Section: Micro-speaker Modelingmentioning

confidence: 99%

MEMS audio speakers ^*

Garud,

Pratap

2023

J. Micromech. Microeng.

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Miniaturization of electro-mechanical sensors and actuators has benefited from an advancement in CMOS technology over the years. However, miniaturization of audio speakers has seen considerable development only in the recent times. This paper reviews the developments in MEMS audio speaker research and the initial commercial products available in the market. At first glance, it appears that the relatively slow development of MEMS speakers can be attributed to the fact that the principle of actuation has remained unchanged for several decades. Unfortunately, the physics behind audible sound production holds us back from exclusively adopting miniaturized speakers — sound pressure level is directly proportional to the area of the sound radiating surface. Nevertheless, researchers are continuing to explore new avenues for designing and developing MEMS speakers, without limiting themselves to the existing actuation principles. With newly discovered materials and improving technology, the research in MEMS speakers is gaining attention and new products are emerging. A speaker design based on piezoelectric actuation or electrostatics actuation is favourable at MEMS scale. Indian research community is also contributing to advances in MEMS speakers and near-ultrasonic devices. This paper reviews the development in MEMS audio speakers in India and in the world. The tabulated review findings aim to offer readers an overview of the development of micro-speakers and to provide guidance for designing new micro-speakers.

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“…In order to get an understanding of the capabilities of ADSR under ideal conditions analytical investigations combined with a circuit model for the ear-channel have been used. Based on the geometry and mechanical properties given in [14] an electrostatic actuator is used serving as an example for the comparison between ADSR and the analog mode. It has to be mentioned that due to the limitations regarding the maximum displacement of an electrostatic speaker caused by the so called snap-in effect, the maximum sound pressure is limited by the underlying actuator principle.…”

Section: In Ear Applicationmentioning

confidence: 99%

Investigation of a new method for sound generation – Advanced Digital Sound Reconstruction

Mayrhofer¹

2021

Elektrotech. Inftech.

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The current loudspeaker market has a high demand for portable audio devices. Hence, the miniaturization of loudspeakers (microspeakers) is of great importance for manufacturers. Traditional loudspeakers – for example the electrodynamic loudspeaker – are the forerunners, but so-called MEMS loudspeakers (Micro-Electro-Mechanical-System) have emerged recently. MEMS devices have already been used for sensors (i.e., microphones) to a great extend due to their advantages regarding form factor and production efficiency. Albeit additional challenges for actuators like moving enough air with a microstructure – as it is the case for a loudspeaker – the usage of MEMS technology for loudspeakers is very attractive.Since especially low-frequency audio signals often pose problems for microspeakers, this article focuses on a new sound generation technique called Advanced Digital Sound Reconstruction (ADSR) which is especially well-suited for low-frequency audio signals since ADSR can generate more volume displacement relative to its size. Based on a general description of the principle, an outlook of the possibilities regarding achievable sound pressure compared to the classical excitation scheme is derived. Furthermore, measurements are presented, which aim to prove the concept of ADSR based on already existing actuators.

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Linearizing an electrostatically driven MEMS speaker by applying pre-distortion

Cited by 8 publications

References 16 publications

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

MEMS audio speakers ^*

Investigation of a new method for sound generation – Advanced Digital Sound Reconstruction

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Linearizing an electrostatically driven MEMS speaker by applying pre-distortion

Cited by 8 publications

References 16 publications

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review

MEMS audio speakers *

Investigation of a new method for sound generation – Advanced Digital Sound Reconstruction

Contact Info

Product

Resources

About

MEMS audio speakers ^*