Linear and nonlinear optical properties of dewetted SiGe islands

Supplementary document for Engineering and detection of light scattering directionalities in dewetted nanoresonators through Dark-field Scanning Microscopy - 6263498.pdf

“…The SiGe layer is deposited by molecular-beam epitaxy (MBE) at 500 °C in a static ultra-high vacuum (pressure ∼10−10 Torr). The multiple arrays of square patches were then fabricated by EBL and RIE [1]. The square side have a width from 400 to 800 nm with a fixed pitch of 3 um in both in-plane directions.…”

Light scattering features induced by residual layers in dielectric dewetted nanoparticles

“…This method that exploits the natural instability of thin films to form a variety of nanostructures with high fidelity over hundreds of repetitions and extremely large scales [16][17][18][19], has emerged among several alternatives as one of the most convenient approaches thanks to its scalability and the possibility to form ordered and disordered structures via self-assembly [19][20][21]. The optical properties of self-assembled nanostructures have been widely investigated in many previous works, both in the near-field [22] and in the far-field [23,24], highlighting how Mie resonances sustained by the nanoantennas under tilted illumination, can generate radiation patterns in different directions [25]. Here, we analyse through light scattering simulations and by means of the Scanning Dark-field Optical Microscopy (SDOM) how an extra radiation lobe is generated by the scattering of the pedestal where the dewetted island is sitting on.…”