LiNbO3 films – A low-cost alternative lead-free piezoelectric material for vibrational energy harvesters

Clementi, Giacomo; Lombardi, Giulia; Margueron, Samuel; Suárez, Miguel Ángel; Lebrasseur, Éric; Ballandras, S.; Imbaud, J.; Lardet‐Vieudrin, F.; Gauthier-Manuel, Ludovic; Dulmet, Bernard; Lallart, Mickaël; Bartasyte, Ausrine

doi:10.1016/j.ymssp.2020.107171

Cited by 40 publications

(24 citation statements)

References 32 publications

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“…Therefore, their use has been proposed to power up macroscale devices [27]. On the other hand, their role in powering the Internet of Things (IoT) nodes has also been explored, either by implementing them with off-the-shelf radio frequency modules, showing the possibility of sending data wirelessly every 2 s at resonance [28], or using their electromechanical properties along with low-power Bluetooth modules to obtain self-powered acceleration sensors [29].…”

Section: Introductionmentioning

confidence: 99%

Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

Barrientos

Clementi

Trigona

et al. 2022

Sensors

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In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO3. The fabrication technology has been developed to realize micromachined self-generating transducers to convert kinetic energy into electrical energy. The process proposed presents several interesting features with the possibility of realizing smaller scale devices, integrated systems, miniaturized mechanical and electromechanical sensors, and transducers with an active layer used as the main conversion element. When the system is fabricated in the typical cantilever configuration, it can produce a peak-to-peak open-circuit output voltage of 0.208 V, due to flexural deformation, and a power density of 1.9 nW·mm−3·g−2 at resonance, with values of acceleration and frequency of 2.4 g and 4096 Hz, respectively. The electromechanical transduction capability is exploited for sensing and power generation/energy harvesting applications. Theoretical considerations, simulations, numerical analyses, and experiments are presented to show the proposed LiNbO3-based MEMS fabrication process suitability. This paper presents substantial contributions to the state-of-the-art, proposing an integral solution regarding the design, modelling, simulation, realization, and characterization of a novel transducer.

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Section: Introductionmentioning

confidence: 99%

Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

Barrientos

Clementi

Trigona

et al. 2022

Sensors

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“…The experimentally identified quality factor was Q = 396 and the modified structural coupling 𝑘 𝑚 2 = 0.028, leading to an estimated figure of merit of 𝑘 𝑚 2 𝑄 = 11, which indicated that our studied system was highly-coupled [22]. These values are typical for single crystal materials [23], but they represent a significant improvement compared to our previous results [15] (𝑘 𝑚 2 𝑄 = 0.3). Indeed, in this study we had considered LiNbO3 (YXlt)/128°/90°, which effectively increased the transverse electromechanical coupling [13] compared to (YXlt)/36°/90° orientation.…”

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confidence: 52%

“…The implementation of LiNbO3 in form of bulk crystals for purpose of energy harvesting, shows too low capacitance and results challenging for electronic interfacing and impedance matching [16]. Instead, the thick films obtained by wafer on wafer technology [17], highly investigated in the field of acoustics and optics [18], allowed to address the capacitance issues and to show high vibrational energy harvesting efficiency at high acceleration (3 g) and frequencies in the kHz range [15]. In this paper, we have addressed the issue of the LiNbO3-based vibrational harvester compatibility with vibrations available in the environment by lowering down the resonance frequency to ~ 105.9 Hz of LiNbO3/Si beams, in order to attain high power densities under very low acceleration levels (0.1 g).…”

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confidence: 99%

Highly coupled and low frequency vibrational energy harvester using lithium niobate on silicon

Clementi

Ouhabaz

Margueron

et al. 2021

Applied Physics Letters

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LiNbO3 has been little studied for the piezoelectric energy harvesting applications. Although, it is a cheap piezoelectric material without lead and toxic elements, and it beneficiates of technological maturity in single crystal fabrication for optical and acoustic applications. In this letter, we propose to investigate a (YXlt)/128°/90° LiNbO3 cut as it offers a transverse piezoelectric coupling of k23 = 0.49 which is comparable to that of commonly used PZT ceramics. A flexible beam of 65 mm length and tip mass made of LiNbO3 thick film bonded on silicon was studied under 0.1 g sinusoidal acceleration. The beam presented an open-circuit resonance frequency of 105.9 Hz and a displacement up to 1.5 mm. In the frame of single degree of freedom lumped model with rectifying bridge, the electromechanical coupling of the device (km 2 ), the figure of merit 𝑘 𝑚 2 𝑄 and the normalized average power density were compared to both Pb-based and Pb-free current devices. The generated power density by our device was 965 µW/cm²/g², which is among the highest reported values compared to both Pb-and Pb-free vibrational harvesting devices.

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“…By means of UV lithography and electron-beam evaporation techniques, Cr/Au top electrodes (30 nm/170 nm) were patterned on the surface of the LiNbO 3 active layer. In order to optimize the voltage output, just part of the piezoelectric layer was covered with the top electrode, namely 2/3 of the overall length, which follows the same pattern presented by Clementi et al (2021). Eventually the samples were diced and then cleaned with acetone and de-ionized water.…”

Section: Experimental Studymentioning

confidence: 99%

Multi-dimensional constrained energy optimization of a piezoelectric harvester for E-gadgets

et al. 2021

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LiNbO3 films – A low-cost alternative lead-free piezoelectric material for vibrational energy harvesters

Cited by 40 publications

References 32 publications

Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

Highly coupled and low frequency vibrational energy harvester using lithium niobate on silicon

Multi-dimensional constrained energy optimization of a piezoelectric harvester for E-gadgets

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