Highly coupled and low frequency vibrational energy harvester using lithium niobate on silicon

Clementi, Giacomo; Ouhabaz, Merieme; Margueron, Samuel; Suárez, Miguel Ángel; Bassignot, Florent; Gauthier-Manuel, Ludovic; Belharet, Djaffar; Dulmet, Bernard; Bartasyte, Ausrine

doi:10.1063/5.0052615

Cited by 24 publications

(15 citation statements)

References 30 publications

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“…For these reasons, the pursued approach has arisen interest in order to fabricate microscale sensors and transducers. Moreover, macroscale LiNbO 3 energy harvesters have been recently investigated, obtaining power densities comparable with lead-free and lead-based materials [26]. Therefore, their use has been proposed to power up macroscale devices [27].…”

Section: Introductionmentioning

confidence: 99%

Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

Barrientos

Clementi

Trigona

et al. 2022

Sensors

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In this paper, we present integrated lead-free energy converters based on a suitable MEMS fabrication process with an embedded layer of LiNbO3. The fabrication technology has been developed to realize micromachined self-generating transducers to convert kinetic energy into electrical energy. The process proposed presents several interesting features with the possibility of realizing smaller scale devices, integrated systems, miniaturized mechanical and electromechanical sensors, and transducers with an active layer used as the main conversion element. When the system is fabricated in the typical cantilever configuration, it can produce a peak-to-peak open-circuit output voltage of 0.208 V, due to flexural deformation, and a power density of 1.9 nW·mm−3·g−2 at resonance, with values of acceleration and frequency of 2.4 g and 4096 Hz, respectively. The electromechanical transduction capability is exploited for sensing and power generation/energy harvesting applications. Theoretical considerations, simulations, numerical analyses, and experiments are presented to show the proposed LiNbO3-based MEMS fabrication process suitability. This paper presents substantial contributions to the state-of-the-art, proposing an integral solution regarding the design, modelling, simulation, realization, and characterization of a novel transducer.

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Section: Introductionmentioning

confidence: 99%

Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

Barrientos

Clementi

Trigona

et al. 2022

Sensors

Self Cite

View full text Add to dashboard Cite

show abstract

“…32.2 Hz and output power density of up to 11.0 mW/(cm 3 •g 2 ) [80]. Another harvester with a flexible beam of 65 mm length and a tip mass made of a LiNbO 3 thick film bonded on silicon produced power density of 965 µW/cm 2 /g 2 , which is among the highest reported values compared to both Pb-and Pb-free vibrational harvesting devices [81].…”

Section: Domain Engineering Memristors Sensors and Harvestersmentioning

confidence: 85%

State of the Art in Crystallization of LiNbO3 and Their Applications

et al. 2021

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Lithium niobate (LiNbO3) crystals are important dielectric and ferroelectric materials, which are widely used in acoustics, optic, and optoelectrical devices. The physical and chemical properties of LiNbO3 are dependent on microstructures, defects, compositions, and dimensions. In this review, we first discussed the crystal and defect structures of LiNbO3, then the crystallization of LiNbO3 single crystal, and the measuring methods of Li content were introduced to reveal reason of growing congruent LiNbO3 and variable Li/Nb ratios. Afterwards, this review provides a summary about traditional and non-traditional applications of LiNbO3 crystals. The development of rare earth doped LiNbO3 used in illumination, and fluorescence temperature sensing was reviewed. In addition to radio-frequency applications, surface acoustic wave devices applied in high temperature sensor and solid-state physics were discussed. Thanks to its properties of spontaneous ferroelectric polarization, and high chemical stability, LiNbO3 crystals showed enhanced performances in photoelectric detection, electrocatalysis, and battery. Furthermore, domain engineering, memristors, sensors, and harvesters with the use of LiNbO3 crystals were formulated. The review is concluded with an outlook of challenges and potential payoff for finding novel LiNbO3 applications.

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“…𝑘 𝑒 2 𝑄 𝑚 is a relevant figure of merit for piezoelectric devices as its maximization induces the maximization of the product of the maximal harvested power and the frequency bandwidth. 𝑘 𝑒 2 𝑄 𝑚 has already been considered in literature to compare VEHs [17,20,21], but no modelling was proposed for design purpose. The next section is dedicated to derivation of the expression of 𝑘 𝑒 2 𝑄 𝑚 and its maximization.…”

Section: Expression and Maximization Of The Quality Factor 𝑸 𝒎mentioning

confidence: 99%

High performance piezoelectric vibration energy harvesting by electrical resonant frequency tuning

Gibus

Morel

Gasnier

et al. 2022

Smart Mater. Struct.

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Extending the frequency bandwidth of vibration energy harvesters (VEH) that power wireless sensor nodes is of scientific and industrial interest. In this aim, electrical methods to tune the resonant frequency of piezoelectric harvesters with strong electromechanical coupling coefficients have been developed. In this work, we provide guidelines for designing such strongly coupled VEH and present a broadband harvester with high normalized power density (NPD). Through an analytical model, we explain how the coupling coefficient k² and the quality factor Qm of a cantilever can be jointly maximized, thereby maximizing the figure of merit ke²Qm. The proposed cantilever prototype made of PZN-5.5PT and aluminum offers one of the best coupling coefficients among the state-of-the-art (k²=49.8%) and a high quality factor (Qm=140). Associated to an appropriate tunable electrical interface (short-circuit synchronous electric charge extraction in our case), the prototype exhibits a normalized power density of 12.0 mW/g²/cm3 and a frequency bandwidth (BW) of 36.0 % (56.5 Hz around 157 Hz) at 0.34 m/s² with a tunable electrical interface: the short-circuit synchronous electric charge extraction. This represents the highest product NPW×BW from state of the art.

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Highly coupled and low frequency vibrational energy harvester using lithium niobate on silicon

Cited by 24 publications

References 30 publications

Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester

State of the Art in Crystallization of LiNbO3 and Their Applications

High performance piezoelectric vibration energy harvesting by electrical resonant frequency tuning

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