LiNbO 3 thick films grown on sapphire by using a multistep sputtering process

Abstract

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Residual stresses and clamped thermal expansion in LiNbO3 and LiTaO3 thin films

“…[2][3][4][5] Although high quality thin epitaxial LN and LT films have been fabricated by different techniques, the growth of thick films, required for surface acoustic wave applications and guided-wave integrated optics, is far from routine. 6,7 Electrical and electrooptical properties reported so far are not comparable to those of LN and LT single-crystals. 8,9 Another complicating factor is the non-stoichiometry of Li, which also influences the physical and structural properties of LN-LT.…”

Piezoelectric Activity inc-Axis Oriented LiNbO3/ZnO Bilayers Grown by Laser Ablation Technique

“…In-line fiber optic modulators, domain engineered interfaces for controlled electro-optic deflections 1, integrated optical wave guide structures [2] , temperature stable surface acoustic wave (SAW) [3] and acousto-optic devices are some of the potential applications. Optical waveguiding [4] and surface acoustic wave propagation [5] (SAW) has been demonstrated on epitaxial LiNbO 3 films grown on sapphire and LiTaO 3 single crystal substrates. There is a growing interest to find matched substrate materials, buffer layers and electrode layers that promote the desired crystallization of LiNbO 3 .…”

Fast Humidity Sensing and Switching of LiNbO3Films on Silicon

“…The LN-film=Si structures are considered as promising for replacement LN thin plate single crystalline elements of functional optoelectronics, in particular for surface acoustic wave (SAW) devices, non-linear optics (wave-guides and frequency doublers), and telecommunication (optical switchers and filters) applications [1,2]. The structures of LN-film=Si are also attractive for integrated ferroelectric random access memories (FeRAM) [3].…”