2014
DOI: 10.1007/s00339-014-8935-9
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Leakage current reduction in junctionless tunnel FET using a lightly doped source

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Cited by 26 publications
(14 citation statements)
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“…However, the ultra-sharp doping concentration gradient in the source/channel and the drain/channel junctions complicates the fabrication process of TFET device in nanometer regime [6,7]. Recently, a junctionless TFET (JLTFET) has been proposed, in which issues caused by ultra-sharp doping concentration gradient in the source/channel and the drain/channel junctions are eliminated [6][7][8][9][10][11][12]. JLTFET is a heavy doped thin film semiconductor, in which the type and level of doping are unchanged throughout the device.…”
Section: Introductionmentioning
confidence: 99%
“…However, the ultra-sharp doping concentration gradient in the source/channel and the drain/channel junctions complicates the fabrication process of TFET device in nanometer regime [6,7]. Recently, a junctionless TFET (JLTFET) has been proposed, in which issues caused by ultra-sharp doping concentration gradient in the source/channel and the drain/channel junctions are eliminated [6][7][8][9][10][11][12]. JLTFET is a heavy doped thin film semiconductor, in which the type and level of doping are unchanged throughout the device.…”
Section: Introductionmentioning
confidence: 99%
“…To avoid complex fabrication processes and high thermal budgets in TFETs, the junctionless tunneling field effect transistor (JLTFET) [22][23][24][25][26][27][28][29][30] has been studied extensively in recent years, which uses uniformly high-doping concentration in the source, channel and drain regions so that the doping concentration and type of channel region are consistent with source region and drain region. Due to uniform doping, the JLTFET is immune to random dopant fluctuations (RDFs) and overcomes complex fabrication processes in manufacturing, meanwhile, source and drain region are formed by the charge plasma concept which further avoids high thermal budgets in the JLTFET.…”
Section: Introductionmentioning
confidence: 99%
“…To avoid the above issues in TFETs, the junctionless tunneling field effect transistor (JLTFET) [24][25][26][27][28][29][30] is proposed, which uses a uniformly high-doping concentration in source, channel, and drain region, wherein the doping concentration and type of channel are consistent with source and drain. Therefore, junctionless tunnel field-effect transistor (JLTFET) is immune to random dopant fluctuations (RDFs) [31], while complex fabrication processes and high thermal budgets in JLTFET manufacturing can be effectively avoided by the charge plasma concept.…”
Section: Introductionmentioning
confidence: 99%