Lateral shearing interferometer for EUVL: theoretical analysis and experiment

Zhu, Yucong; Sugisaki, Katsumi; Ouchi, Chidane; Hasegawa, Masanobu; Niibe, Masahito; Suzuki, Atsushi; Murakami, Katsuhiko

doi:10.1117/12.537331

Cited by 6 publications

(3 citation statements)

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“…The root mean square (RMS) of phase-restoration error is 0.001598 rad. Under the same condition, the RMS of phase-restoration error is 0.001509 rad with the 9-frame phase shifting algorithm proposed by Zhu [14]. Two different methods are used to deal with the interferograms with the zeroth order effect, and the relative error of the phase-restoration error is less than 6%.…”

Section: Simulationsmentioning

confidence: 92%

“…Furthermore, the error is not negligible for wavefront aberration measurement of lithography lens. In 2004, Zhu et al proposed a 9-frame phase shifting algorithm to solve the zeroth order effect problem under the condition of small phase shifting error [14]. In 2013, we improved the 11-frame algorithm to solve this problem under the condition of large phase shifting error [15].…”

Section: Introductionmentioning

confidence: 99%

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Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry

Fang

Xiang

et al. 2018

Photonic Sens

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In this paper, a calibration method is proposed which eliminates the zeroth order effect in lateral shearing interferometry. An analytical expression of the calibration error function is deduced, and the relationship between the phase-restoration error and calibration error is established. The analytical results show that the phase-restoration error introduced by the calibration error is proportional to the phase shifting error and zeroth order effect. The calibration method is verified using simulations and experiments. The simulation results show that the phase-restoration error is approximately proportional to the phase shift error and zeroth order effect, when the phase shifting error is less than 2° and the zeroth order effect is less than 0.2. The experimental result shows that compared with the conventional method with 9-frame interferograms, the calibration method with 5-frame interferograms achieves nearly the same restoration accuracy.

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Section: Simulationsmentioning

confidence: 92%

Section: Introductionmentioning

confidence: 99%

Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry

Fang

Xiang

et al. 2018

Photonic Sens

View full text Add to dashboard Cite

show abstract

“…The EEI works well and the seven types of the interferograms were successfully obtained. [3][4][5][6] In this paper, we report on comparisons among seven metrological methods. The comparisons are performed from the viewpoints of accuracy, precision and practicality.…”

Section: Introductionmentioning

confidence: 99%