Lateral resolution of nanoscaled images delivered by surface-analytical instruments: application of the BAM-L200 certified reference material and related ISO standards

Abstract

The certified reference material BAM-L200, a nanoscale stripe pattern for length calibration and specification of lateral resolution, is described. BAM-L200 is prepared from a cross-sectioned epitaxially grown layer stack of AlxGa1-xAs and InxGa1-xAs on a GaAs substrate. The surface of BAM-L200 provides a flat pattern with stripe widths ranging down to 1 nm. Calibration distances, grating periods and stripe widths have been certified by TEM with traceability to the length unit. The combination of gratings, isolated narrow stripes and sharp edges of wide stripes offers plenty of options for the determination of lateral resolution, sharpness and calibration of length scale at selected settings of imaging surface-analytical instruments. The feasibility of the reference material for an analysis of the lateral resolution is demonstrated in detail by evaluation of ToF-SIMS, AES and EDX images. Other applications developed in the community are summarized, too. BAM-L200 fully supports the implementation of the revised International Standard ISO 18516 (in preparation) which is based on knowledge outlined in the Technical Report ISO/TR 19319:2013.

Polymeric spatial resolution test patterns for mass spectrometry imaging using nano‐thermal analysis with atomic force microscopy

“…In order to test and evaluate the advances in these instruments with respect to spatial resolution, both the appropriate resolution reference materials and unbiased procedures to evaluate the quality of the images produced are required. As the spatial resolution of these technologies has begun to reach into the nanometer regime, finding readily available or easily made resolution reference materials has become particularly challenging for both elemental and molecular imaging purposes …”

Lateral Resolution of Imaging Surface-Analytical Instruments as SIMS, AES and XPS: Application of the BAM-L200 Certified Reference Material and Related ISO Standards

“…Fig. 4 shows a result when a (color online) Layout and design of the certified reference material BAM L200 for imaging AES and SIMS instruments [8].…”

“…3 and ref. [8]) is available in the Web Shop of BAM at www.bam.de. Therefore, I think it is worth to be published from JSA .…”

Improved Spatial Resolution of EDX/SEM for the Elemental Analysis of Nanoparticles

“…One of the few examples is the reference sample BAM-L200, a material with stripe structures of certified dimensions in the nano-range, specially designed for testing the spatial resolution of imaging micro/nano-probe techniques. This material has been prepared as a FIB lamella [4] and it was demonstrated that spatial resolutions of the EDX signals in the range of a few nm can be achieved.The need for and the availability of automatic image acquisition (including spectral information) with the goal of automatic chemical classification will be discussed. The coupled automatic data evaluation will be also addressed by some practical examples.…”

“…One of the few examples is the reference sample BAM-L200, a material with stripe structures of certified dimensions in the nano-range, specially designed for testing the spatial resolution of imaging micro/nano-probe techniques. This material has been prepared as a FIB lamella [4] and it was demonstrated that spatial resolutions of the EDX signals in the range of a few nm can be achieved.…”