Lateral optical accelerometer micromachined in (100) silicon with remote readout based on coherence modulation

Schropfer, G.; Elflein, Wilhelm; Labachelerie, M. de; Porte, H.; Ballandras, S.

doi:10.1016/s0924-4247(98)00065-x

Cited by 51 publications

(23 citation statements)

References 5 publications

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“…In spite of this limitations the performance is comparable to more sophisticated and more expensive Fabry-Perot based devices of Ref. 16 and it outperforms previously published opto-mechanical MEMS accelerometers.…”

Section: Fourier Transform Spectrometer (Fts)mentioning

confidence: 60%

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Applications of SOI-based optical MEMS

Noell

Clerc

Dellmann

et al. 2002

IEEE J. Select. Topics Quantum Electron.

118

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Section: Fourier Transform Spectrometer (Fts)mentioning

confidence: 60%

“…[13,14,15,16] The accelerometer presented here is based on the measurement of an optical modulation caused by a moving mass (Fig. 6a).…”

Section: Fourier Transform Spectrometer (Fts)mentioning

confidence: 99%

Applications of SOI-based optical MEMS

Noell

Clerc

Dellmann

et al. 2002

IEEE J. Select. Topics Quantum Electron.

118

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“…When illuminated by a broad spectrum, the FP spectrum reflected by the cavity shifts when the mass is moving. By measuring the shift, a practical resolution of 500 g has been demonstrated [12] for a dynamic range of 10 g. Thanks to the fiber optics detection, a distant measurement without even an electrical supply at the measurement site can be performed, which allows using the sensor in a harsh environment.…”

Section: A Modulated Optical Sensorsmentioning

confidence: 99%

The role of silicon micromachining in optical fiber sensing technologies

Gorecki

Labachelerie²,

Thiéry³

2003

IEEE Sensors J.

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Silicon micromachining has the advantage of small scale and easy integration with electronic circuits and sensors, resulting in the production of miniaturized and smart microsystems with moving parts. The size of the microelectromechanical systems/microoptoelectromechanical systems devices is immediately compatible with the size of integrated optics (IOs), and is appropriate to control or manipulate optical radiations. This technology is, therefore, suitable to fabricate precision-defined optical components and offers relatively easy alignment procedures of optical parts. This paper examines the contribution of micromachined structures in the specific context of optical fiber sensing technology. A number of demonstrator sensors will be discussed, with special emphasis on sensors with micromachined IO structures, nanoscale scanning optical microscope sensors, and fiber IO circuits coupling systems.

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“…Accelerometers fabricated using micromachining technology are based mainly on the change of the frequency of a microresonator [1], which is expected to have an ultrahigh Q value owing to its ultrasmall structure. Measurements of displacements of a movable microstructure that corresponds to a seismic mass have been reported; these measurements may be based on capacitance [2][3][4][5], a tunneling current [6], or diffraction [7]; they may be made with an optical fiber [8][9][10][11][12][13] or a split photodiode [14]; or they may use strain detection [15,16] based on an MOS structure. Although accelerometers based on resonators promise higher sensitivity, it is difficult to control the vacuum conditions and feed back the changes.…”

Section: Introductionmentioning

confidence: 99%