Abstract:A novel wafer-scale silicon fractal fabrication method is presented here for forming pyramids only in the lateral direction using the crystal orientation of silicon. Fractals are fabricated in silicon by masking only the corners (corner lithography) of a cavity in silicon with silicon nitride, where the shape is determined by the crystal {111} planes of the silicon. The octahedral cavity shaped by the {111} planes was previously only used for forming octahedral fractals in all directions, but by using a planar… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations –citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.