Latching micro magnetic relays with multistrip permalloy cantilevers

Ruan, M.; Shen, Jun; Wheeler, C B

doi:10.1109/memsys.2001.906519

Cited by 21 publications

(26 citation statements)

References 4 publications

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“…Bi-stability can easily be achieved thanks to the use of magnets [13], [14], [15], [16], [17]. Magnets can either be included in the Microsystems or can be a large external magnet on which the microstructure is attached [18], [19], [20].…”

Section: Advantages Of Electromagnetic Actuation and Down Scalingmentioning

confidence: 99%

Electromagnetic remote control and downscaling advantages and examples for MOEMS

et al. 2001

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Electromagnetic actuation is applied to MOEMS for industrial applications requiring large and long-range forces. Advantages and drawbacks are outlined while down scaling laws are discussed. Technological improvements and new available materials bring to much smaller dimensions, the limit between Electromagnetism and Electrostatics. Remote control and bi-stability are unique characteristics of electromagnetic actuation. The importance of remote control is stressed so as to allow easy tests and optimisation with no technological compatibility problem. These advantages are illustrated on three different electromagnetic MOEMS, developed in LIMMS, a Franco-Japanese research Laboratory based in Tokyo. The first is a resonant 1D magnetic scanner, the second is a magnetic bi-stable matrix array of optical micro-switches and the last is a remarkable application of the properties of thick Magnetostrictive thin layers to a 2D scanner.

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Section: Advantages Of Electromagnetic Actuation and Down Scalingmentioning

confidence: 99%

Electromagnetic remote control and downscaling advantages and examples for MOEMS

et al. 2001

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“…The membrane is usually made using gold or aluminium material. MEMS switches can be actuated by various methods, such as electrostatic [4][5][6], electromagnetic [7], piezoelectric [8], and thermal [9] actuation. Due to the near-zero power consumption and linearity, electrostatic actuation is most widely used, in which electrostatic force is generated between the fixed electrode and the movable membrane for switching operation.…”

Section: Introductionmentioning

confidence: 99%

Effective Stress Modeling of Membranes Made of Gold and Aluminum Materials Used in Radio-Frequency Microelectromechanical System Switches

Singh¹

2013

Transactions on Electrical and Electronic Materials

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Microelectromechanical system switches are becoming more and more popular in the electronics industry; there is a need for careful selection of the materials in the design and fabrication of switches for reliability and performance issues. The membrane used for actuation to change the state of an RF switch is made mostly using gold or aluminum. Various designs of membranes have been proposed. Due to the flexure-type structures, the design complexity increases, which makes stress analysis mandatory to validate the reliability and performance of a switch. In this paper, the effective stress and actuation voltage required for different types of fixed-fixed membranes is analyzed using finite element modeling. Effective measures are presented to reduce the stress and voltage.

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“…The bridge allows or blocks the electronic transmission through mechanical movement of the membrane above the electrode [3]. MEMS switches can be actuated by various methods, such as electrostatic [4][5][6], electromagnetic [7], piezoelectric [8], and thermal [9] actuation. Due to the near-zero power consumption and linearity, electrostatic actuation is most widely used, in which electrostatic force is generated between a fixed electrode and a movable membrane for switching operation.…”

Section: Introductionmentioning

confidence: 99%

Stress Analysis Using Finite Element Modeling of a Novel RF Microelectromechanical System Shunt Switch Designed on Quartz Substrate for Low-voltage Applications

Singh¹,

Khaira²,

Sengar³

2013

Transactions on Electrical and Electronic Materials

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This paper presents a novel shunt radio frequency microelectromechanical system switch on a quartz substrate with stiff ribs around the membrane. The buckling effects in the switch membrane and stiction problem are the primary concerns with RF MEMS switches. These effects can be reduced by the proposed design approach due to the stiffness of the ribs around the membrane. A lower mass of the beam and a reduction in the squeeze film damping is achieved due to the slots and holes in the membrane, which further aid in attaining high switching speeds. The proposed switch is optimized to operate in the k-band, which results in a high isolation of -40 dB and low insertion loss of -0.047 dB at 21 GHz, with a low actuation voltage of only 14.6 V needed for the operation the switch. The membrane does not bend with this membrane design approach. Finite element modeling is used to analyze the stress and pull-in voltage.

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Latching micro magnetic relays with multistrip permalloy cantilevers

Cited by 21 publications

References 4 publications

Electromagnetic remote control and downscaling advantages and examples for MOEMS

Electromagnetic remote control and downscaling advantages and examples for MOEMS

Effective Stress Modeling of Membranes Made of Gold and Aluminum Materials Used in Radio-Frequency Microelectromechanical System Switches

Stress Analysis Using Finite Element Modeling of a Novel RF Microelectromechanical System Shunt Switch Designed on Quartz Substrate for Low-voltage Applications

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