Laser Processing of Flexible In-Plane Micro-supercapacitors: Progresses in Advanced Manufacturing of Nanostructured Electrodes

Abstract

Flexible in-plane architecture micro-supercapacitors (MSCs) are competitive candidates for on-chip miniature energy storage applications owing to their light weight, small size, high flexibility, as well as the advantages of short charging time, high power density, and long cycle life. However, tedious and time-consuming processes are required for the manufacturing of high-resolution interdigital electrodes using conventional approaches. In contrast, the laser processing technique enables high-efficiency high-precision patterning and advanced manufacturing of nanostructured electrodes. In this review, the recent advances in laser manufacturing and patterning of nanostructured electrodes for applications in flexible in-plane MSCs are comprehensively summarized. Various laser processing techniques for the synthesis, modification, and processing of interdigital electrode materials, including laser pyrolysis, reduction, oxidation, growth, activation, sintering, doping, and ablation, are discussed. In particular, some special features and merits of laser processing techniques are highlighted, including the impacts of laser types and parameters on manufacturing electrodes with desired morphologies/structures and their applications on the formation of high-quality nanoshaped graphene, the selective deposition of nanostructured materials, the controllable nanopore etching and heteroatom doping, and the efficient sintering of nanometal products. Finally, the current challenges and prospects associated with the laser processing of in-plane MSCs are also discussed. This review will provide a useful guidance for the advanced manufacturing of nanostructured electrodes in flexible in-plane energy storage devices and beyond.

Tin Oxide/Vertically Aligned Graphene Hybrid Electrodes Prepared by Sonication-Assisted Sequential Chemical Bath Deposition for High-Performance Supercapacitors

“…Many studies have reported the fabrication of MO/graphene hybrid electrodes using hydrothermal methods having a simple procedure, microwave-assisted synthesis providing rapid synthesis, electrochemical deposition, laser processing, and chemical bath deposition (CBD) . The electrochemical deposition and laser processing can control the surface structure, size, and shape of the electrode elaborately by controlling the electrochemical conditions . CBD, with a simple process, has the advantage of being able to be performed at a low temperature .…”

“… 19 The electrochemical deposition and laser processing can control the surface structure, size, and shape of the electrode elaborately by controlling the electrochemical conditions. 20 CBD, with a simple process, has the advantage of being able to be performed at a low temperature. 21 These synthesis methods are variously used in the synthesis of hybrid electrodes according to the manufacturing requirements.…”

Planar micro-supercapacitors toward high performance energy storage devices: design, application and prospects

“…The laser scribing strategy has emerged as a scalable and time-saving technique to engrave high-resolution patterns with precisely controlled laser parameters, including laser power, processing speed, processing time, resolution, frequency and Z axis offset. 73 Various laser wavelengths ranging from ultraviolet (UV) to infrared (IR) regions have been developed to scribe film structure materials into patterned electrodes. 74,75 According to the requirements of processing efficiency and precision, the laser wavelength should be rigorously controlled by computer systems.…”

Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring

“…4 Additionally, there is no development and rinsing in ultrafast laser processing; therefore, it has the advantages of few steps, no mask, fast processing and environmental friendliness. [5][6][7] These merits lead to many applications in a variety of aspects, such as the use of ultrafast laser-induced microexplosion to create and recover high-density polymorphs, 8 ultrafast laser pulse for building photonic lattices, 9 and direct nanowriting in air. 10 Also, these characteristics enable ultrafast laser to achieve ultrahigh precision in the processing of three-dimensional (3D) micro/nano structures.…”