2013
DOI: 10.1149/05008.0113ecst
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Laser Patterned Junctionless In-Plane-Gate Oxide Thin-Film Transistors Arrays

Abstract: A novel laser scribing process was successfully developed in fabricating junctionless low-voltage oxide-based thin-film transistors (TFTs) arrays without any mask and photolithography steps at room temperature. Such junctionless TFTs feature that the channel and the source/drain electrodes are of the same thin indium-tin-oxide films without any intentional source/drain junction deposition process. Effective field-effect modulation of the drain current has been realized. Such junctionless in-plane-gate TFTs exh… Show more

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