Laser Micro‐ and Nanoprocessing of Diamond Materials

Konov, V. I.; and, Taras V. Kononenko; Кононенко, В. В.

doi:10.1002/9783527648603.ch12

Cited by 22 publications

(33 citation statements)

References 82 publications

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“…Pulsed-laser graphitization and laser-guided graphitization wave propagation in SCD have been studied extensively in the context of 3D-laser writing [40]. In LNC, graphitization waves are propagated by focusing the laser through the starting SCD plate such that the beam fluence is sufficiently large at the bottom surface nucleation site to initiate graphitization, while the defocused beam throughout the bulk of the SCD does not create any material damage, as illustrated in Fig.…”

Section: Discussionmentioning

confidence: 99%

“…3. Once the graphitization wave is initiated at the nucleation site, the ablation threshold drops abruptly such that the fluence required to propagate the wave is much lower than the bulk graphitization threshold [40], allowing for the wavefront to be guided along a (111) plane by laterally scanning the laser in the x-direction as indicated in Fig. 2.…”

Section: Discussionmentioning

confidence: 99%

“…Despite some recent advances [4,37], inherent challenges still remain in growing (111)-oriented layers thicker than ≈100 nm with low surface roughness. For this reason, macroscopic (111)faced plates are typically cut from larger (100)-faced starting plates using micro-machining laser ablation tools [38] and subsequent polishing steps are used to reduce the surface roughness [39,40]. This process results in substantial loss of costly SCD material (kerf loss) along with misalignment of the resulting face relative to [111], since it is nearly impossible to polish the (111) face using traditional methods [20].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Fabrication of (111)-faced single-crystal diamond plates by laser nucleated cleaving

Parks

Grote

Hopper

et al. 2018

Diamond and Related Materials

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Single-crystal diamond plates with surfaces oriented in a (111) crystal plane are required for high-performance solid-state device platforms ranging from power electronics to quantum information processing architectures. However, producing plates with this orientation has proven challenging. In this paper, we demonstrate a method for reliably and precisely fabricating (111)-faced plates from commercially available, chemical-vapor-deposition-grown, type-IIa single-crystal diamond substrates with (100) faces. Our method uses a nanosecond-pulsed visible laser to nucleate and propagate a mechanical cleave in a chosen (111) crystal plane, resulting in faces as large as 3.0 mm × 0.3 mm with atomically flat surfaces, negligible miscut angles, and near zero kerf loss. We discuss the underlying physical mechanisms of the process along with potential improvements that will enable the production of millimeter-scale (111)-faced single-crystal diamond plates for a variety of emerging devices and applications.

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Section: Discussionmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Fabrication of (111)-faced single-crystal diamond plates by laser nucleated cleaving

Parks

Grote

Hopper

et al. 2018

Diamond and Related Materials

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“…The development of high power pulsed excimer lasers, with a wavelength shorter or comparable to the diamond absorption edge of 235 nm [14], led to the consequential possibility of maximizing the interaction between diamond and the shaping radiation, thus allowing an effective microstructuring. Laser-assisted modifications of diamond structure were found to alter significantly the optical properties of diamond, paving the way for the development of infrared (IR) optical filters when periodic structures were fabricated on the surface or in the bulk [15].…”

Section: Introductionmentioning

confidence: 99%

Surface Texturing of CVD Diamond Assisted by Ultrashort Laser Pulses

et al. 2017

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Diamond is a wide bandgap semiconductor with excellent physical properties which allow it to operate under extreme conditions. However, the technological use of diamond was mostly conceived for the fabrication of ultraviolet, ionizing radiation and nuclear detectors, of electron emitters, and of power electronic devices. The use of nanosecond pulse excimer lasers enabled the microstructuring of diamond surfaces, and refined techniques such as controlled ablation through graphitization and etching by two-photon surface excitation are being exploited for the nanostructuring of diamond. On the other hand, ultrashort pulse lasers paved the way for a more accurate diamond microstructuring, due to reduced thermal effects, as well as an effective surface nanostructuring, based on the formation of periodic structures at the nanoscale. It resulted in drastic modifications of the optical and electronic properties of diamond, of which "black diamond" films are an example for future high-temperature solar cells as well as for advanced optoelectronic platforms. Although experiments on diamond nanostructuring started almost 20 years ago, real applications are only today under implementation.

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“…Patterning such thin films is a fundamental processing step in any of these applications. Patterning of thin film diamond has been achieved with a variety of techniques including oxygen based reactive ion etching [5], pre-patterning of the seed layer [6] and laser micromachining [7].…”

Section: Introductionmentioning

confidence: 99%

CO_2 laser micromachining of nanocrystalline diamond films grown on doped silicon substrates

Richter

Abdou

Williams

et al. 2016

Opt. Mater. Express

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We demonstrate that nanocrystalline diamond films grown on highly doped silicon substrates can be patterned using a CO 2 laser operating at a wavelength of 10.6 m, where both low doped silicon and diamond exhibit negligible optical absorption. The patterning is initiated by free carrier absorption in the silicon substrate and further enhanced by the thermal runaway effect, which results in surface heating in the silicon substrate and subsequent thermal ablation of the diamond film in an oxygen rich atmosphere. Using this approach, micron-scale grating and dot patterns are patterned in thin film diamond. The localized heating is simulated and analyzed using concurrent optical and thermal finite element modelling. The laser patterning method described here offers a cost effective and rapid solution for micro-structuring diamond films.

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Laser Micro‐ and Nanoprocessing of Diamond Materials

Cited by 22 publications

References 82 publications

Fabrication of (111)-faced single-crystal diamond plates by laser nucleated cleaving

Fabrication of (111)-faced single-crystal diamond plates by laser nucleated cleaving

Surface Texturing of CVD Diamond Assisted by Ultrashort Laser Pulses

CO_2 laser micromachining of nanocrystalline diamond films grown on doped silicon substrates

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