Laser marking of materials by means of micro mirror array

Kuntze, Thomas; Panzner, Michael; Klotzbach, Udo; Beyer, Eckhard

doi:10.2351/1.5066189

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2013

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“…Excimer lasers are used in wide range of industrial, scientific and medical applications (Kuntze et al 2002;Zagorulko et al 2004;Groothoff et al 2003;Hutchinson 1983). They are also used in micro machining of polymers, ceramics and semiconductors.…”

Section: Introductionmentioning

confidence: 99%

Development of a compact and reliable repetitively pulsed Xe Cl (308 nm) excimer laser

Benerji

Varshnay

Mittal

2013

Sadhana

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Development and operation characteristics of a repetitively pulsed UV spark pre-ionized XeCl (Xenon Chloride) excimer laser is described. The laser uses discharge pumped CC charge transfer excitation. A compact gas circulation loop was adopted to achieve high repetition rate operation. The laser generates optical pulses of energy 150 mJ at 150 Hz reliably. The electrical to optical conversion efficiency obtained is 1%. The laser pulse duration is ∼8 nS (FWHM). The single fill gas lifetime have been found to be 2 × 10 6 shots for 20% reduction of energy without any halogen injection. The system is compact and reliable.

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Section: Introductionmentioning

confidence: 99%