Laser interference patterning methods: Possibilities for high-throughput fabrication of periodic surface patterns

Lasagni, Andrés Fabían

doi:10.1515/aot-2017-0016

Cited by 40 publications

(22 citation statements)

References 49 publications

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“…Laser-based manufacturing techniques have provided the required technological and cost-effective aspects to produce micro-and nanostructures using top-down approaches [75][76][77]. One technique of fabricating periodic structures is LIL [78][79][80][81]. In LIL, the interference pattern generated by the superposition of multiple laser beams is employed to expose a photoresist layer.…”

Section: Optics-based Ilmentioning

confidence: 99%

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Lee

et al. 2020

Sensors

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Metasurfaces have shown promising potential to miniaturize existing bulk optical components thanks to their extraordinary optical properties and ultra-thin, small, and lightweight footprints. However, the absence of proper manufacturing methods has been one of the main obstacles preventing the practical application of metasurfaces and commercialization. Although a variety of fabrication techniques have been used to produce optical metasurfaces, there are still no universal scalable and high-throughput manufacturing methods that meet the criteria for large-scale metasurfaces for device/product-level applications. The fundamentals and recent progress of the large area and high-throughput manufacturing methods are discussed with practical device applications. We systematically classify various top-down scalable patterning techniques for optical metasurfaces: firstly, optical and printing methods are categorized and then their conventional and unconventional (emerging/new) techniques are discussed in detail, respectively. In the end of each section, we also introduce the recent developments of metasurfaces realized by the corresponding fabrication methods.

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Section: Optics-based Ilmentioning

confidence: 99%

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Lee

et al. 2020

Sensors

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“…A more flexible approach for the fabrication of periodic structures is the Direct Laser Interference Patterning (DLIP) method, by which two or more coherent beams are overlapped at the material surface to generate an interference pattern. If the local intensity is high enough to initiate the ablation, a periodic pattern can be directly engraved on the material [ 57 ]. Furthermore, controlling the number of interfering beams and their overlapping angle, the radiation polarization, and deposited fluence, as well as different textures shapes, periodicities, and aspect ratios are achievable.…”

Section: Introductionmentioning

confidence: 99%

Microfabrication and Surface Functionalization of Soda Lime Glass through Direct Laser Interference Patterning

et al. 2021

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All-purpose glasses are common in many established and emerging industries, such as microelectronics, photovoltaics, optical components, and biomedical devices due to their outstanding combination of mechanical, optical, thermal, and chemical properties. Surface functionalization through nano/micropatterning can further enhance glasses’ surface properties, expanding their applicability into new fields. Although laser structuring methods have been successfully employed on many absorbing materials, the processability of transparent materials with visible laser radiation has not been intensively studied, especially for producing structures smaller than 10 µm. Here, interference-based optical setups are used to directly pattern soda lime substrates through non-lineal absorption with ps-pulsed laser radiation in the visible spectrum. Line- and dot-like patterns are fabricated with spatial periods between 2.3 and 9.0 µm and aspect ratios up to 0.29. Furthermore, laser-induced periodic surface structures (LIPSS) with a feature size of approximately 300 nm are visible within these microstructures. The textured surfaces show significantly modified properties. Namely, the treated surfaces have an increased hydrophilic behavior, even reaching a super-hydrophilic state for some cases. In addition, the micropatterns act as relief diffraction gratings, which split incident light into diffraction modes. The process parameters were optimized to produce high-quality textures with super-hydrophilic properties and diffraction efficiencies above 30%.

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“…LIL nanostructuring [19], a maskless, wafer-scale, stitching defect free technique, attracts a special attention. Its natural capability to generate and combine various interference fields is intensively studied for multiscale fabrication [20][21][22][23] and multi-beam interference ablation [24].…”

Section: Introductionmentioning

confidence: 99%

Subwavelength diffraction gratings with macroscopic moiré patterns generated via laser interference lithography

Ushkov¹,

Verrier²,

Kämpfe³

et al. 2020

Opt. Express

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We propose a simple and flexible fabrication approach based on the moiré effect of photoresist gratings for rapid synthesis of apodized structures with continuously varying depth. Minor modifications in a standard laser interference lithography setup allow creating macroscopic, visible by naked eye moiré patterns that modulate the depth of subwavelength diffraction gratings. The spatial frequency of this modulation is easily controlled in a wide range, allowing to create a quasicrystal in extreme cases. Experimental results are confirmed by a theory with clear graphical solutions and numerical modeling. The method is universal and does not depend on a specific choice of photoresist and/or substrate materials, making it a promising choice for structured light applications, optical security elements or as a basic structuring method of complex optical devices.

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Laser interference patterning methods: Possibilities for high-throughput fabrication of periodic surface patterns

Cited by 40 publications

References 49 publications

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Scalable and High-Throughput Top-Down Manufacturing of Optical Metasurfaces

Microfabrication and Surface Functionalization of Soda Lime Glass through Direct Laser Interference Patterning

Subwavelength diffraction gratings with macroscopic moiré patterns generated via laser interference lithography

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