Laser-induced break-up of water jet waveguide

Couty, Philippe; Spiegel, Akos; Vago, Nandor; Ugurtas, B. I.; Hoffmann, P.

doi:10.1007/s00348-003-0775-x

Cited by 25 publications

(12 citation statements)

References 24 publications

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“…209 The geometries of the chamber and nozzle are critical to energy coupling of the laser beam into the water jet and the mode of water jet guided laser beam. 213,214 The stable length of the water jet is about 1000 times the jet diameter. The water jet can thus be described as a fluid optical waveguide of variable length.…”

Section: Water Jet Guided Laser Dicing Technologymentioning

confidence: 99%

Die singulation technologies for advanced packaging: A critical review

Lei

Kumar

Yalamanchili

2012

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Die singulation, also known as wafer dicing, is reviewed in terms of the brief history, critical challenges, characterization of singulation quality, different singulation technologies and underlying mechanisms, and post-singulation die strength enhancement. Mechanical blade dicing has been the workhorse of die separation in the semiconductor manufacturing process. It faces growing challenges due to the adoption of copper/low-k dielectric interconnect structures, thin and ultra-thin wafers, die attach films, narrow dicing streets, and complex stacked structures on the dicing streets. Key dicing quality characteristics are chipping, delamination, kerf geometry, die side wall damage, die surface contamination, and die strength degradation. Various die singulation technologies have been developed to address these challenges and quality issues, including dicing by thinning, laser based approaches, laser and mechanical hybrid method, and plasma dicing. Die strength is a critical parameter for thin and ultra-thin dies. Post-dicing die strength enhancement is becoming the complement of most dicing technologies to achieve dies with high fracture strength. Plasma dicing has the potential to achieve much higher die strengths than all the other dicing approaches.

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Section: Water Jet Guided Laser Dicing Technologymentioning

confidence: 99%

Die singulation technologies for advanced packaging: A critical review

Lei

Kumar

Yalamanchili

2012

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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“…On the basis of the theoretical explanations given, conditions for stable operation are indicated. Comparison was made between the theory and exist ing experimental [13] and numerical studies [14]. The new theoretical results and improved understanding of the phenomenon of instability of high speed water jets form a basis for the improvement of the water jet cut ting technology.…”

Section: Discussionmentioning

confidence: 99%

Instability of water jet: Aerodynamically induced acoustic and capillary waves

Broman

Руденко

2012

Acoust. Phys.

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Abstract-High speed water jet cutting has important industrial applications. To further improve the cutting performance it is critical to understand the theory behind the onset of instability of the jet. In this paper, insta bility of a water jet flowing out from a nozzle into ambient air is studied. Capillary forces and compressibility of the liquid caused by gas bubbles are taken into account, since these factors have shown to be important in previous experimental studies. A new dispersion equation, generalizing the analogous Rayleigh equation, is derived. It is shown how instability develops because of aerodynamic forces that appear at the streamlining of an initial irregularity of the equilibrium shape of the cross section of the jet and how instability increases with increased concentration of gas bubbles. It is also shown how resonance phenomena are responsible for strong instability. On the basis of the theoretical explanations given, conditions for stable operation are indicated.

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“…However, for small jet diameters and when high-power laser light is coupled into the jet with offset, laser-induced breakup can occur, leading to the premature breakup of the jet. 15 …”

Section: Optimization Of Laser Couplingmentioning

confidence: 97%

“…They are due to initial perturbations [12][13][14] and also to laser-induced breakup. 15 In addition, due to the long interaction length between the high-intensity beam of a 100-W frequency-doubled Nd:YAG laser and water, high-efficiency stimulated Raman scattering has been seen in micrometer-size water jets. 16 The aim of this article is to demonstrate the laser ablation process when using a high-power laser focused into a microjet with direct coupling.…”

Section: Introductionmentioning

confidence: 99%

Laser coupling with a multimode water-jet waveguide

Couty¹,

Wagner²,

Hoffmann

2005

Opt. Eng

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The coupling of a laser focused into a water microjet is studied. Using a high-power laser, the light guided in the jet is used to process various materials. To explain the observed ablation patterns, the propagation of a low-power and highly coherent laser beam coupled into a laminar water jet is studied. The light of a He-Ne laser (5 mW) is focused into the water jet, which behaves as a multimode waveguide. The distribution of the light intensity in the jet impinging on a glass plate cutting the jet perpendicularly to its propagation direction is recorded for various laser coupling conditions. The influence of the jet diameter, as well as the influence of the depth of focus of the incident beam and its position with respect to the center of the jet is studied. A nearly homogeneous grain size was observed over the whole jet cross section. The characteristic grain size was then compared with predictions from standard multimode fiber theory. Finally, it is confirmed that the structures resulting from material ablation using the laser-microjet technology when coupling Q-switched Nd:YAG (ϭ1064 and 355 nm) are closely related to the predicted light intensity distributions. Furthermore, recommendations are made concerning the coupling conditions for optimizing the laser processing applications.

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Laser-induced break-up of water jet waveguide

Cited by 25 publications

References 24 publications

Die singulation technologies for advanced packaging: A critical review

Die singulation technologies for advanced packaging: A critical review

Instability of water jet: Aerodynamically induced acoustic and capillary waves

Laser coupling with a multimode water-jet waveguide

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