Laser forward transfer based on a spatial light modulator

Auyeung, R. C. Y.; Kim, Heung Soo; Charipar, Nicholas A.; Birnbaum, Andrew J.; Mathews, Scott A.; Piqué, Alberto

doi:10.1007/s00339-010-6054-9

Cited by 51 publications

(31 citation statements)

References 8 publications

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“…Recent results have shown the lateral shaping of deposits in a dynamic fashion for laser-induced forward transfer (LIFT), via the use of a digital micromirror device (DMD) acting as a spatial light modulator [6,7], hence enabling the rapid prototyping of complex shapes with micron-scale fabrication resolution. This approach provides a more flexible alternative to focussing or imaging of an aperture [8,9] and complements alternative beam-shaping approaches previously used for LIFT, which assist in the pre-machining of the donor for transfer of structures with small dimensions [10], smooth side walls [11] or reduced amount of debris [12].…”

Section: Introductionmentioning

confidence: 99%

Laser-induced backward transfer of nanoimprinted polymer elements

et al. 2016

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Femtosecond laser-induced backward transfer of transparent photopolymers is demonstrated in the solid state, assisted by a digital micromirror spatial light modulator for producing shaped deposits. Through use of an absorbing silicon carrier substrate, we have been able to successfully transfer solid-phase material, with lateral dimensions as small as *6 lm. In addition, a carrier of silicon incorporating a photonic waveguide relief structure enables the transfer of imprinted deposits that have been accomplished with surface features exactly complementing those present on the substrate, with an observed minimum feature size of 140 nm.

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Section: Introductionmentioning

confidence: 99%

Laser-induced backward transfer of nanoimprinted polymer elements

et al. 2016

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“…The ability to deposit complex shapes in one transfer step greatly reduces the processing time and avoids problems related to the merging of multiple voxels, a common problem in most digital printing techniques. The ability to dynamically adjust the spatial profile of individual laser pulses 17 serves to increase the writing speed of LDT as compared to other laser direct write (LDW) techniques. As a result of these processing advantages, we refer to the LDT process as being "partially parallelized" since it allows the combination of multiple serial writing steps into a single parallel one.…”

Section: Introductionmentioning

confidence: 99%

Laser-induced Forward Transfer of Ag Nanopaste

Breckenfeld

Kim

Auyeung

et al. 2016

JoVE

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Over the past decade, there has been much development of non-lithographic methods 1-3 for printing metallic inks or other functional materials.Many of these processes such as inkjet 3 and laser-induced forward transfer (LIFT) 4 have become increasingly popular as interest in printable electronics and maskless patterning has grown. These additive manufacturing processes are inexpensive, environmentally friendly, and well suited for rapid prototyping, when compared to more traditional semiconductor processing techniques. While most direct-write processes are confined to two-dimensional structures and cannot handle materials with high viscosity (particularly inkjet), LIFT can transcend both constraints if performed properly. Congruent transfer of three dimensional pixels (called voxels), also referred to as laser decal transfer (LDT) [5][6][7][8][9] , has recently been demonstrated with the LIFT technique using highly viscous Ag nanopastes to fabricate freestanding interconnects, complex voxel shapes, and high-aspect-ratio structures. In this paper, we demonstrate a simple yet versatile process for fabricating a variety of micro-and macroscale Ag structures. Structures include simple shapes for patterning electrical contacts, bridging and cantilever structures, high-aspect-ratio structures, and single-shot, large area transfers using a commercial digital micromirror device (DMD) chip.

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“…This so-called nano-ink or nano-paste is irradiated by a flattopped laser beam, using aperture masks to achieve limited flexibility in pellet shape. Auyeung et al [18,19] improved LDT by using a digital micro-mirror device (DMD) for spatial beam shaping. DMDs are able to modulate the intensity of the incident laser beam in a binary fashion (on or off) on a per-pixel basis and are used to vary the pellet shape on demand.…”

Section: Introductionmentioning

confidence: 99%

Solid-phase laser-induced forward transfer of variable shapes using a liquid-crystal spatial light modulator

et al. 2015

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Laser-induced forward transfer is a promising method for 3D printing of various materials, including metals. The ejection mechanism is complex and depends strongly on the experimental parameters, such as laser fluence and donor layer thickness. However, the process can be categorized by the physical condition of the ejected material, i.e., the donor layer is transferred in liquid phase or the material is transferred as a 'pellet' in solid phase. Currently, solid-phase transfer faces several problems. Large shearing forces, occurring at the pellet perimeter during transfer, limit the similarity between the desired pellet shape and the deposited pellet shape. Furthermore, the deposited pellet may be surrounded by debris particles formed by undesired transferred donor material. This work introduces a novel approach for laser-induced forward transfer of variable shaped solid-phase pellets. A liquidcrystal spatial light modulator (SLM) is used to apply grayscale intensity modulation to an incident laser beam to shape the intensity profile. Optimized beams consist of a high fluence perimeter around an interior characterized by a lower fluence level. These beams are used successfully to transfer solid-phase pellets out of a 100-nm Au donor layer using a single laser pulse. The flexibility of the SLM allows a variable desired pellet shape. The shapes of the resulting deposited pellets show a high degree of similarity to the desired shapes. Debris-free deposited pellets are achieved by pre-machining the donor layer, prior to the transfer, using a double-pulse process.

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Laser forward transfer based on a spatial light modulator

Cited by 51 publications

References 8 publications

Laser-induced backward transfer of nanoimprinted polymer elements

Laser-induced backward transfer of nanoimprinted polymer elements

Laser-induced Forward Transfer of Ag Nanopaste

Solid-phase laser-induced forward transfer of variable shapes using a liquid-crystal spatial light modulator

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