Laser confocal feedback tomography and nano-step height measurement

Tan, Yidong; Wang, Weiping; Xu, Chunxin; Zhang, Shulian

doi:10.1038/srep02971

Cited by 60 publications

(27 citation statements)

References 28 publications

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“…However, there still exist many restrictions in practical application, such as complex light path and high reference beam requirement. Laser self-mixing interference (SMI) technology is a novel coherent measurement technique which has been researched and developed in many sensing and measuring fields, such as absolute distance, displacement, velocity, and vibration measurement [8,9,10,11]. SMI technology applied in LDV [12,13] is called SM-LDV, which can replace traditional LDVs on many occasions because of its compact and simple structure, easy alignment, reliability, and low cost.…”

Section: Introductionmentioning

confidence: 99%

All-Fiber Configuration Laser Self-Mixing Doppler Velocimeter Based on Distributed Feedback Fiber Laser

Wang

Xiang

et al. 2016

Sensors

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In this paper, a novel velocimeter based on laser self-mixing Doppler technology has been developed for speed measurement. The laser employed in our experiment is a distributed feedback (DFB) fiber laser, which is an all-fiber structure using only one Fiber Bragg Grating to realize optical feedback and wavelength selection. Self-mixing interference for optical velocity sensing is experimentally investigated in this novel system, and the experimental results show that the Doppler frequency is linearly proportional to the velocity of a moving target, which agrees with the theoretical analysis commendably. In our experimental system, the velocity measurement can be achieved in the range of 3.58 mm/s–2216 mm/s with a relative error under one percent, demonstrating that our novel all-fiber configuration velocimeter can implement wide-range velocity measurements with high accuracy.

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Section: Introductionmentioning

confidence: 99%

All-Fiber Configuration Laser Self-Mixing Doppler Velocimeter Based on Distributed Feedback Fiber Laser

Wang

Xiang

et al. 2016

Sensors

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“…The highly sensitive selfmixing modulation effect has led to cost-effective LDpumped self-mixing thin-slice solid-state laser metrology, whose sensitivity is enhanced by a fluorescenceto-photon lifetime ratio of K 10 5 -10 7 [2]. Versatile applications [2] include naturally self-aligned laser Doppler velocimetry (LDV), vibrometry, microanalysis of Brownian particles, detection of a small particle in the liquid flow, biosensing, quick analysis of molecular dynamics and zeta potential of colloidal particles [3,4], and confocal tomography [5]. Effective long-term interference between a lasing field and a coherent component of a scattered field that is fed back to the laser resonator is expected in thin-slice solid-state lasers, because of their high degree of coherence of the lasing field, which is expected to possess a narrow linewidth [6,7].…”

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confidence: 99%

Long-haul self-mixing interference and remote sensing of a distant moving target with a thin-slice solid-state laser

Otsuka¹

2014

Opt. Lett.

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An effective long-haul self-mixing interference effect has been observed in a thin-slice LiNdP₄O₁₂ (LNP) laser due to Doppler-shifted optical feedback from a distant target. The narrow spectral linewidth of the LNP laser, which was evaluated to be 16 kHz by heterodyne measurements, led to successful self-mixing laser Doppler velocimetry and vibrometry of targets placed 2.5 km away from the laser through single-mode optical fiber access.

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“…It has proved to be a powerful tool in the precision measurement of displacement, velocity, thickness, angles and refractive index etc [6][7][8][9][10][11][12][13]. Identical to the conventional two-beam interferometers, the measurement standard of SMI is the laser wavelength λ.…”

Section: Introductionmentioning

confidence: 99%

Micro-displacement reconstruction using a laser self-mixing grating interferometer with multiple-diffraction

Guo¹,

Shi²,

Yu³

et al. 2017

Opt. Express

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In this paper, we demonstrated an improved laser self-mixing grating interferometer (SMGI) with autocollimation design which can avoid the disturbance from the light feedback of the zero-order diffraction beam. In order to obtain higher optical subdivision, SMGI with multiple-diffraction is implemented. Both theoretical analysis and experimental work show that the proposed system for displacement measurement can achieve high sensitivity and low measurement uncertainty. Using the proposed system, different forms of micro-displacement signals applied on the target (grating) have been reconstructed with accuracy of a few nanometers. The work presented in this paper provides a good way to achieve robust and high precision measurement with compact system configuration. Disciplines Engineering | Science and Technology Studies Abstract:In this paper, we demonstrated an improved laser self-mixing grating interferometer (SMGI) with auto-collimation design which can avoid the disturbance from the light feedback of the zero-order diffraction beam. In order to obtain higher optical subdivision, SMGI with multiple-diffraction is implemented. Both theoretical analysis and experimental work show that the proposed system for displacement measurement can achieve high sensitivity and low measurement uncertainty. Using the proposed system, different forms of micro-displacement signals applied on the target (grating) have been reconstructed with accuracy of a few nanometers. The work presented in this paper provides a good way to achieve robust and high precision measurement with compact system configuration. 4550-4556 (2011). 19. T. Bosch and S. Donati, "Optical feedback interferometry for sensing application," Opt. Eng. 40(1), 20-27 (2001). 20. W. Xia, M. Wang, Z. Yang, W. Guo, H. Hao, and D. Guo, "High-accuracy sinusoidal phase-modulating selfmixing interferometer using an electro-optic modulator: development and evaluation," Appl. Opt. 52(4), B52-B59 (2013).

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Laser confocal feedback tomography and nano-step height measurement

Cited by 60 publications

References 28 publications

All-Fiber Configuration Laser Self-Mixing Doppler Velocimeter Based on Distributed Feedback Fiber Laser

All-Fiber Configuration Laser Self-Mixing Doppler Velocimeter Based on Distributed Feedback Fiber Laser

Long-haul self-mixing interference and remote sensing of a distant moving target with a thin-slice solid-state laser

Micro-displacement reconstruction using a laser self-mixing grating interferometer with multiple-diffraction

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