Laser bending for adjusting curvatures of hard disk suspensions

Zhang, Richard; Xu, Xianfan

doi:10.1007/s00542-005-0588-3

Cited by 13 publications

(8 citation statements)

References 12 publications

(19 reference statements)

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“…The technique which uses soft cushion between the wafer and the chuck to bend the wafer for topography compensation was already reported (9). Another approach is the use of liquid with similar refractive index to SU-8 between the mask and the wafer to compensate the air gap (10).…”

Section: Methodsmentioning

confidence: 99%

Fabrication of High Aspect Ratio SU-8 Structures Using UV Lithography and Megasonic-Enhanced Development

Figura¹,

Bartel²

2010

ECS Trans.

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In recent years SU-8 resist attracted a high interest for fabrication of structures with high topography or high aspect ratio structures. The reasons for SU-8 popularity can be found in its unique properties -high chemical and mechanical stability, biological compatibility, optical transparency, high aspect ratio capability and low cost of fabrication. SU-8 can be used as an alternative molding material to LIGA process; in comparison to the standard LIGA process, relatively thick (1 mm range) SU-8 layers can be processed with UV lithography and do not require expensive X-ray light source. Nevertheless, processing of thick layers of SU-8 is not without challenges -coating high viscosity material, critical soft bakes in order of several hours, exposure requiring good contact, critical post exposure bake and extremely long development times. One aspect of the SU-8 processing, which is explored in this paper, is improvement of the development process time -by using single wafer megasonic-enhanced development. In this paper, the experimental results from manufacturing of SU-8 structures with aspect ratio 1:23 by using UV lithography and megasonicenhanced development will be presented. Significant development time reduction from 240 min down to 10 min was achieved.

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Section: Methodsmentioning

confidence: 99%

Fabrication of High Aspect Ratio SU-8 Structures Using UV Lithography and Megasonic-Enhanced Development

Figura¹,

Bartel²

2010

ECS Trans.

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“…The laser was utilized to adjust the static pitch and roll while the polynomial regression model is used to estimate the numbers of laser beam projections [6]. Reference [7] proposed the use of 3D finite element analysis to compute bending of suspension using laser. This paper focused on adjusting the pitch and roll of suspension.…”

Section: Gram Load Adjust Process and Key Process Input Variablesmentioning

confidence: 99%

Process yield improvement on the gram load adjusting process of a suspension manufacturer

Asawarungsaengkul

Sukamta

2011

2011 IEEE International Conference on Quality and Reliability

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This paper presents the improvement on the process yield of gram load adjustment by utilizing the six sigma concept. In define phase, the objective of this study is to increase the yield of this process. Currently, a process yield is 98.59%. The root cause analysis tools including Cause & Effect Diagram, Cause & Effect Matrix, and FMEA are employed to determine the key process input variables (KPIVs). There are 6 potential KPIVs selected into this study. Then, the design of experiment is conducted to investigate the effect of these KPIVs to the mean and variance of gram load after adjustment. A single replicate of 2 6-1 fractional factorial design with 4 center points is also performed. The results from the statistical analysis shows that both main and interaction effects have significant influence to the mean and variance of gram load of the suspension while there is no curvature effect to the response variables. The optimal process parameter is obtained and can increase process yield of selected machine from 98.59% to 99.14%.

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“…The development of the LPF process can enable die-free design flexibility, production of complex shapes, thick plate forming, and spatial forming of a sheet metal component [6,7]. For instance, a laser peen micro-bending method has been applied to accurately adjust micro-components for micro-electro-mechanical system [8][9][10][11] or optical devices [12].…”

Section: Introductionmentioning

confidence: 99%

Effect of confinement on surface modification for laser peen forming without protective coating

Shen

Ding

Wang

et al. 2016

Surface and Coatings Technology

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In this study, multiple laser peen forming (LPF) experiments were conducted for micro-bending Aluminum alloy 1060, OHFC Copper, and commercially pure Titanium specimens under confinement media of water and air. Surface morphological and compositional changes as well as the mechanical properties of the treated specimens were experimentally analyzed to determine the effect of confinement during LPF. Significantly different surface morphological characteristics were captured and quantitatively analyzed. Clear feed mark patterns were found to be caused by the laser pulse feed for all materials under air confinement. Under water confinement, specimen surfaces appeared in a tarnished, featureless surface texture without showing any feed marks. The mechanisms of laser-material interaction during LPF were studied for various materials under different confinement media. The surface chemical composition change was investigated on the surface and in depth. More chemical composition change was observed under air confinement than under water, while it was limited within the topmost 10-30 nm under both water and air confinement.

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Laser bending for adjusting curvatures of hard disk suspensions

Cited by 13 publications

References 12 publications

Fabrication of High Aspect Ratio SU-8 Structures Using UV Lithography and Megasonic-Enhanced Development

Fabrication of High Aspect Ratio SU-8 Structures Using UV Lithography and Megasonic-Enhanced Development

Process yield improvement on the gram load adjusting process of a suspension manufacturer

Effect of confinement on surface modification for laser peen forming without protective coating

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