in recent years the use of modern solid-state lasers has brought about a distinct increase in operational speed in laser materials processing. Whether with scanners or fixed optics, high speeds -as far as possible in various axes at the same time -have almost become the norm. But although the movement of the optic is precisely calculated, the position of the processing point can deviate from the planned contour. help is at hand, thanks to a process monitoring system developed by Fraunhofer iLT which precisely tracks the relative movement of work piece and optic. it enables acceleration related deviations from the set contour and speed to be measured exactly and the numerical control system to be adjusted accordingly. The kinematics measurement can be adapted to most laser processes (e.g. welding, brazing, cutting, selective laser melting, etc.) as an optional metrology method. 1Different fields of application for this new measurement system are shown in this article which represent three levels of machine integration. the first application for contour tracking is the assistance during the machine setup. By measuring for example a robots trajectory, the machine setter is enabled to modify the nc-program in order to optimize the robots kinematic behavior. Secondly, the kinematics measurement can be applied to qualify the machine's movements. if the measurement system is integrated into processing heads like welding or brazing heads, it empowers manufacturers to measure the trajectory and detect deviations from the required accuracy. the measured machine state can be documented for quality management purposes. the third application field requires also an integration into existing processing heads but rather than for off-line measurement it is used to measure the trajectory during the process in real-time. With short latency times it may provide a control of the laser power depending on the actual velocity. that type of system would automatically adjust the energy supply per unit length.