Laser Beam Processing and Wafer-Scale Integration

Design optimization of laser-induced microbridges for low resistance interline connections in ICs

“…Different laser-induced metal anti-fuse structures and their applications, such as Laser PROM, Laser Field Programmable Gate Array and Analog Array (LFPGA and LFPAA), have been developed. Some of this approaches have shown wide process interval (windows) and high yields [3][4][5][6]. Both inter and intra-level connections can be made with MakeLink.…”