Laser-assisted etching of borosilicate glass in potassium hydroxide

Bischof, David; Kahl, Michael; Michler, Markus

doi:10.1364/ome.417871

Cited by 15 publications

(14 citation statements)

References 13 publications

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“…In a subsequent etching step, uniform removal of the unmodified covers at both surfaces occurs before the increased etching rate of the laser modified glass [36] leads to a separation when the etching radius exceeds the modification pitch at each depth within the sample. Figure 13 shows the symmetric edge that is produced with this revised processing strategy and the shifted focal line.…”

Section: Separation Resultsmentioning

confidence: 99%

All-round: combining laser cutting and edge shaping of glass

Sohr

Thomas

Skupin

2022

Eur. Phys. J. Spec. Top.

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Cutting glass to shape with ultra short laser pulses is nowadays a well established industrial process. Pulses with an elongated straight focal volume (line focus) are used to modify the workpiece throughout its entire depth with one single laser shot. At the same time, processed glass is often required to have a seamed or round edge, which usually requires an extra grinding step.Here we demonstrate that curved line foci can be used to combine cutting and edge shaping of glass sheets in one laser process. We reconsider the Airy-Gauss beam for this purpose, and suggest modifications to the beam profile to avoid unwanted effects, in particular an asymmetric laser modification of the glass sheet. We provide a combined experimental and numerical analysis of the laser process, and show a symmetric convex edge created in a 920 µm thick glass sheet.

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Section: Separation Resultsmentioning

confidence: 99%

All-round: combining laser cutting and edge shaping of glass

Sohr

Thomas

Skupin

2022

Eur. Phys. J. Spec. Top.

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“…[14][15][16] ULISE generally involves local laser modification of glass followed by chemical treatment with hydrofluoric acid (HF) or potassium hydroxide (KOH) to preferentially etch away the laser modified regions (LMRs) due to the much higher etching rate than nonmodified regions. [17][18][19][20] ULISE thus enables fabrication of high-quality, high-aspect-ratio holes in glass substrates. In the present study, we propose a scheme to demonstrate an efficient method of writing 20 000 micro-through-holes (MTHs) in a glass slide by ULISE using a Bessel beam for the purpose of digital NAAT.…”

Section: Introductionmentioning

confidence: 99%

Rapid Manufacturing of Glass‐Based Digital Nucleic Acid Amplification Chips by Ultrafast Bessel Pulses

Zhang,

Obata,

Ozasa

et al. 2023

Small Science

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Advanced nucleic acid amplification techniques require separating test samples into numerous units (digitalization), which enables higher sensitivity and accuracy than traditional methods. Reagent partition tools are commercially available, but are usually complex and expensive, hindering mass adoption. Herein, the fabrication of a large‐scale micro‐through‐hole array on glass substrates for an advanced digital nucleic acid amplification technique (NAAT) is demonstrated. To meet the requirement of hole quantities (over tens of thousands) for valid nucleic acid statistics, ultrafast Bessel pulses with continuous translation of the glass substrate are applied. A single‐shot Bessel pulse can lead to a single hole, and 100 holes can be produced per second (scalable to thousands per second). Experiments using the fabricated chips show that the performance meets the NAAT requirements. This work provides a highly efficient and low‐cost scheme for reagent partitioning that promotes the wide accessibility of advanced digital NAATs as well as a variety of other applications.

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“…1,2 The process is based on two steps: first the glass substrate is selectively exposed to ultrashort pulsed laser radiation and subsequently the modified material is etched away in potassium hydroxide (KOH), leaving the desired 3D glass structure. 3,4 Although well developed, SLE is used in fabrication of 3D glass microfluidic devices and micro channels, 5 but not for optical components due to its residual rough surface. 6,7 Smoothening methods using controlled laser surface-heat treatment have been developed to improve the surface quality and have achieved promising results.…”

Section: Introductionmentioning

confidence: 99%

Optimization processes for three-dimensional microprinting of glass micro-optics

Tan

Cu-Nguyen

Zappe

2023

MOEMS and Miniaturized Systems XXII

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Recent results for flexible manufacturing of fused silica micro-optics using a surface optimization process are presented. Selective laser-induced etching technology (SLE) is used to fabricate highly precise microstructured glass components while thermal annealing is used to smoothen the optical surfaces. An optimization process for SLE printing and thermal annealing is investigated using a response surface methodology. Fabrication parameters such as laser power, writing velocity in the SLE process, as well as annealing temperature and thermal anneal time are varied to minimize the average surface roughness of the glass components. The optimization results show that the average surface roughness of printed glass is reduced from >500 nm to ∼ 10 nm in an area with a diameter of 250 µm, allowing the process to be used for optical applications.

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Laser-assisted etching of borosilicate glass in potassium hydroxide

Cited by 15 publications

References 13 publications

All-round: combining laser cutting and edge shaping of glass

All-round: combining laser cutting and edge shaping of glass

Rapid Manufacturing of Glass‐Based Digital Nucleic Acid Amplification Chips by Ultrafast Bessel Pulses

Optimization processes for three-dimensional microprinting of glass micro-optics

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