Optimization processes for three-dimensional microprinting of glass micro-optics

Abstract

Recent results for flexible manufacturing of fused silica micro-optics using a surface optimization process are presented. Selective laser-induced etching technology (SLE) is used to fabricate highly precise microstructured glass components while thermal annealing is used to smoothen the optical surfaces. An optimization process for SLE printing and thermal annealing is investigated using a response surface methodology. Fabrication parameters such as laser power, writing velocity in the SLE process, as well as annealing temperature and thermal anneal time are varied to minimize the average surface roughness of the glass components. The optimization results show that the average surface roughness of printed glass is reduced from >500 nm to ∼ 10 nm in an area with a diameter of 250 µm, allowing the process to be used for optical applications.