Laser ablation of silicon in water with nanosecond and femtosecond pulses

Ren, Jun; Kelly, Michael J.; Hesselink, Lambertus

doi:10.1364/ol.30.001740

Cited by 85 publications

(34 citation statements)

References 12 publications

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“…A comparable improvement of femtosecond laser ablation by using a water layer has been demonstrated before at the example of silicon, showing even a significant inrease of ablation rates, which was partly due to the efficient removal of debris [12].…”

Section: Laser Micromachining Through Liquid Layerssupporting

confidence: 67%

Improving Laser Ablation of Zirconia by Liquid Films: Multiple Influence of Liquids on Surface Machining and Nanoparticle Generation

Bärsch¹,

Gatti²,

Barcikowski³

et al. 2009

JLMN

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We have analyzed sample surfaces and particles generated during laser processing of tetragonal zirconia, considering ablation in the gas phase and in liquids using different energies and pulse durations. Remarkably, a liquid layer does not only allow collecting nanoparticulate matter and improving the quality of micromachining, but can also enhance material ablation rates.Keywords: ceramic, zirconia, femtosecond laser ablation, micromachining, nanoparticles IntroductionLaser ablation of tetragonal zirconia, a very hard ceramic widely-used in medical technology [1,2], is the key to highly interesting new applications. On the one hand, short-pulsed laser structuring is the only wear-free method to shape fully sintered substrates, for instance to produce dental crowns [3]. On the other hand, particles that are laser-ablated from the surface of zirconia substrates can be embedded into other products to increase their surface strength. This laser-based nanotechnology approach provides the best results if ablated particles have specific characteristics (such as small size and good dispersion) and if a long-term fixation between such particles and the product is achieved [4]. The investigations show how zirconia ablation by femtosecond laser pulses affects micromachining quality and efficiency on the one hand and the amount and characteristics of generated nanoparticles on the other hand, and how ablation through liquid films can combine both aims.

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Section: Laser Micromachining Through Liquid Layerssupporting

confidence: 67%

Improving Laser Ablation of Zirconia by Liquid Films: Multiple Influence of Liquids on Surface Machining and Nanoparticle Generation

Bärsch¹,

Gatti²,

Barcikowski³

et al. 2009

JLMN

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“…Similarly, to ensure handful rise of ablation rate, [117] suggested 3-4 mm layer thickness for alumina. The sprayed water in the form of thin layer could be an alternative solution to this problem [123].…”

Section: Water Layer Thicknessmentioning

confidence: 99%

Laser Ablation and Laser-Hybrid Ablation Processes: A Review

Ahmed¹,

Darwish²,

Alahmari³

2015

Materials and Manufacturing Processes

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Laser beam machining (LBM) has proven its applications and advantages over almost all the range of engineering materials. It offers its competences from macro machining to micro and nano-machining of simple-to-complex shapes. The hybrid approaches in laser ablation have demonstrated much improved results in terms of material removal rate, surface integrity, geometrical tolerances, thermal damage, metallurgical alterations and many more. The flipside of LBM is the existence of universal problems associated with its thermal ablation mechanism. In order to alleviate or reduce the inherent problems of LBM, a massive research has been done during the past decade in order to build a relatively new route of laser-hybrid processes. This paper reviews the research work carried out so far in the area of LBM and its hybrid processes for different materials and shapes. The article also highlights the research gaps and future research directions in the context of laser and laser-hybrid ablation.

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“…Similarly, to ensure handful rise of ablation rate, [161] suggested 3-4 mm layer thickness for alumina. The sprayed water in the form of a thin layer could be an alternative solution to this problem [167]. On the other hand, as the energy absorbance depends on the material wavelength, therefore, the selection of incident laser wavelength, preferably, be such that it should strongly be absorbed by the target matter rather than water film.…”

Section: Water Layer Thicknessmentioning

confidence: 99%

Laser Beam Machining, Laser Beam Hybrid Machining, and Micro-channels Applications and Fabrication Techniques

Darwish

Ahmed

Al‐Ahmari

2016

Advanced Structured Materials

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Laser beam machining (LBM) has proven its applications and advantages over almost all the range of engineering materials. It offers its competences from macro machining to micro and nano-machining of simple-to-complex shapes. The flipside of LBM is the existence of universal problems associated with its thermal ablation mechanism. In order to alleviate or reduce the inherent problems of LBM, a massive research has been done during the past decade and in turn build a relatively new route of laser-hybrid processes. The hybrid approaches in laser ablation have demonstrated much improved results in terms of material removal rate, surface integrity, geometrical tolerances, thermal damage, metallurgical alterations and many more. This chapter reviews the research work carried out so far in the area of LBM and its hybrid processes for different materials and shapes.

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Laser ablation of silicon in water with nanosecond and femtosecond pulses

Cited by 85 publications

References 12 publications

Improving Laser Ablation of Zirconia by Liquid Films: Multiple Influence of Liquids on Surface Machining and Nanoparticle Generation

Improving Laser Ablation of Zirconia by Liquid Films: Multiple Influence of Liquids on Surface Machining and Nanoparticle Generation

Laser Ablation and Laser-Hybrid Ablation Processes: A Review

Laser Beam Machining, Laser Beam Hybrid Machining, and Micro-channels Applications and Fabrication Techniques

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