2015
DOI: 10.1088/0022-3727/48/24/245101
|View full text |Cite
|
Sign up to set email alerts
|

Laser ablation of micro-photonic structures for efficient light collection and distribution

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
3
0

Year Published

2016
2016
2020
2020

Publication Types

Select...
4

Relationship

3
1

Authors

Journals

citations
Cited by 4 publications
(3 citation statements)
references
References 18 publications
0
3
0
Order By: Relevance
“…The optical micro structures are fabricated using a technology based on laser ablation and soft embossing, as reported before 21 , 22 . The pitch and the height of the UV grating structure are experimentally found to be 50 μ m and 7.4 μ m, respectively, which closely approximate those of the master Epocore grating, as shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…The optical micro structures are fabricated using a technology based on laser ablation and soft embossing, as reported before 21 , 22 . The pitch and the height of the UV grating structure are experimentally found to be 50 μ m and 7.4 μ m, respectively, which closely approximate those of the master Epocore grating, as shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Fabrication of optical micro grating structures on glass substrates is the prerequisite for the target LC beam deflecting device. In this study, laser ablation with a nanosecond pulsed laser module of λ=248 nm is applied to the Epocore (micro resist technology GmbH) coated substrates, since it has a low ablation threshold (72±3 mJ cm −2 ) and a low surface roughness (R q <100 nm) [23]. The laser beam shaped by a mask with a triangular aperture is focused onto the Epocore polymer surface with a projection size of L×W=164×50 μm.…”
Section: Device Fabricationmentioning
confidence: 99%
“…Laser ablation is a technology which combines photothermal and photochemical reactions to locally remove the undesired material from a solid surface by applying a number of laser pulses with a certain energy [6]. In this study, Epocore (micro resist technology GmbH) is used as the substrate material for the fabrication of optical structures, since it has a low ablation threshold (72±3 mJ/cm 2 ) and a good surface roughness (R q <100 *E-mail: xiaobing.shang@ugent.be nm) for laser ablation at Ȝ=248 nm [7]. The schematic diagram of the laser ablation process and its setup are illustrated in figure 1.…”
Section: Laser Ablation Of Polymer Micro Gratingsmentioning
confidence: 99%