2019
DOI: 10.3788/ope.20192704.0832
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Large-thrust piezoelectric linear actuator under tension and pressure load

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Cited by 2 publications
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“…Large stroke high precision positioning system in many professional fields has become a key micro-material processing and manufacturing. For example, nanoimprinting film technology as another new concept of nanostructures and new manufacturing processes, in the preparation of nano-electronic components, biotechnology or micro-chemical materials nano-silicon laboratory, micro-optical elements, fuel cell systems and nano-magnetic storage devices and other technical fields play an extremely important role [4][5]. Because of its very small operating object, the requirements for the stroke, speed and accuracy of the equipment are also more stringent [ 6 ].…”
Section: Introductionmentioning
confidence: 99%
“…Large stroke high precision positioning system in many professional fields has become a key micro-material processing and manufacturing. For example, nanoimprinting film technology as another new concept of nanostructures and new manufacturing processes, in the preparation of nano-electronic components, biotechnology or micro-chemical materials nano-silicon laboratory, micro-optical elements, fuel cell systems and nano-magnetic storage devices and other technical fields play an extremely important role [4][5]. Because of its very small operating object, the requirements for the stroke, speed and accuracy of the equipment are also more stringent [ 6 ].…”
Section: Introductionmentioning
confidence: 99%