Optimization design of high precision large stroke piezoelectric linear motion platform

Abstract

With the continuous development of manufacturing technology, ultra-precision machining, precision instruments, semiconductor manufacturing and biomedical engineering, precision positioning technology based on piezoelectric ceramics has been widely used in industrial production, weaponry and scientific research. It is one of the most important technologies to support the development of equipment to high precision, high efficiency and intelligence. However, the precision positioning system is difficult to meet the requirements of large stroke and high precision. Aiming at this problem, a large stroke piezoelectric linear motion platform based on piezoelectric drive is developed. In order to detect the source of error, a high-frequency response and non-contact yaw error detection system combining flat ruler and capacitive micro-displacement sensor is designed, and an error detection method is established. At the same time, in order to compensate the error, a micro-motion error compensation platform based on piezoelectric ceramic drive, elliptical amplification mechanism and flexible dumpling chain drive is designed, and experimental research is carried out. The results show that the proposed method in this paper can compensate the system error, and has good dynamic characteristics, which meets the positioning accuracy required by precision equipment.